Capacitive type dynamic quantity sensor
First Claim
Patent Images
1. A capacitive type dynamic quantity sensor comprising:
- a beam portion having a beam for deforming in a predetermined deformation direction based on physical force application;
a movable electrode formed integrally with the beam portion to move therewith and extending in a direction perpendicular to the predetermined deformation direction; and
a fixed electrode facing the movable electrode and being separated therefrom in the predetermined deformation direction by a predetermined gap;
wherein a width of the beam extending in the direction perpendicular to the predetermined deformation direction and the gap are approximately identical.
1 Assignment
0 Petitions
Accused Products
Abstract
In a capacitive type dynamic quantity sensor, a width of a beam in a beam portion extending in a direction that is perpendicular to a predetermined deformation direction and a gap disposed between a movable electrode and the fixed electrode in the predetermined deformation direction are approximately identical. Accordingly, manufacturing error is prevented from affecting the sensitivity of the capacitive type dynamic quantity sensor. For example, a manufacturing tolerance error of ±2.5% is allowed as a result of designing the width of the beam and the gap to be identical in length.
-
Citations
9 Claims
-
1. A capacitive type dynamic quantity sensor comprising:
-
a beam portion having a beam for deforming in a predetermined deformation direction based on physical force application;
a movable electrode formed integrally with the beam portion to move therewith and extending in a direction perpendicular to the predetermined deformation direction; and
a fixed electrode facing the movable electrode and being separated therefrom in the predetermined deformation direction by a predetermined gap;
wherein a width of the beam extending in the direction perpendicular to the predetermined deformation direction and the gap are approximately identical. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A method of manufacturing a capacitive type dynamic quantity sensor, wherein the capacitive type dynamic quantity sensor has a beam portion with a beam for deforming in a predetermined deformation direction based on physical force application, a movable electrode formed integrally with the beam portion to move therewith and extending in a direction perpendicular to the predetermined deformation direction, and a fixed electrode facing and being separated from the movable electrode, comprising:
forming a trench in a substrate to form the beam portion, the movable electrode and the fixed electrode simultaneously, wherein the forming of the trench forms the beam so as to have a width extending in the direction perpendicular to the predetermined deformation direction, and the gap disposed between the movable electrode and the fixed electrode so as to have a width in the predetermined deformation direction that is approximately identical to the beam width. - View Dependent Claims (7, 8)
-
9. A method of manufacturing a capacitive type dynamic quantity sensor comprising:
forming a trench in a substrate to form a beam portion, a movable electrode and a fixed electrode simultaneously, wherein the forming of the trench forms the beam so as to have a width extending in a direction perpendicular to a predetermined deformation direction, and a gap disposed between the movable electrode and the fixed electrode so as to have a width in the predetermined deformation direction that is approximately identical to the beam width.
Specification