Multiple directional scans of test structures on srmiconductor integrated circuits
First Claim
1. A method of inspecting a sample, comprising:
- a. in a first direction, scanning a first portion of the sample with an incident charged particle beam and detecting a portion of charged particles emitted from the sample in response to the incident charged particle beam;
b. determining a general location of a defect based on the detected charged particles from the first direction scan, wherein the general location corresponds to a second portion of the sample which is outside the first direction scan;
c. in a second direction, scanning the second portion of the sample with an incident charged particle beam and detecting a portion of charged particles emitted from the sample in response to the incident charged particle beam, the second direction being at an angle to the first direction; and
d. determining a specific location of a defect based on the detected charged particles from the second direction scan, wherein the specific location corresponds to a third portion of the sample which is contained within the second portion of the sample.
0 Assignments
0 Petitions
Accused Products
Abstract
Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.
69 Citations
22 Claims
-
1. A method of inspecting a sample, comprising:
-
a. in a first direction, scanning a first portion of the sample with an incident charged particle beam and detecting a portion of charged particles emitted from the sample in response to the incident charged particle beam;
b. determining a general location of a defect based on the detected charged particles from the first direction scan, wherein the general location corresponds to a second portion of the sample which is outside the first direction scan;
c. in a second direction, scanning the second portion of the sample with an incident charged particle beam and detecting a portion of charged particles emitted from the sample in response to the incident charged particle beam, the second direction being at an angle to the first direction; and
d. determining a specific location of a defect based on the detected charged particles from the second direction scan, wherein the specific location corresponds to a third portion of the sample which is contained within the second portion of the sample. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of inspecting a sample, comprising:
-
a. in a first direction, scanning the sample with at least one particle beam;
b. in a second direction, scanning the sample with at least one particle beam, the second direction being at an angle to the first direction, wherein a number of defects per an area of the sample are found as a result of the first scan and a position of one or more found defects is determined from the second scan when one or more defects are found from the first scan. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
Specification