Magnetic recording medium, method of manufacture thereof, and magnetic recorder

• US 20030157373A1
• Filed: 07/11/2002
• Published: 08/21/2003
• Est. Priority Date: 01/13/2000
• Status: Abandoned Application

• Current Assignee: Hitachi Maxell Limited (Maxell, Ltd.)
• Original Assignee: Hitachi Maxell Limited (Maxell, Ltd.)
• Inventors: Matsunuma, Satoshi, Hieida, Harumi, Onuma, Tsuyoshi, Koda, Tetsunori, Mizumura, Tetsuo, Inaba, Nobuyuki, Wakabayashi, Kouichirou, Sotani, Tomoko, Takeuchi, Teruaki, Kirino, Fumiyoshi
• Application Number:
  US10/169,916
• Publication Number:
  US 20030157373A1
• Time in Patent Office: Days
• US Class Current: 428/694DE
• CPC Class Codes: C23C 14/081 of aluminium, magnesium or beryllium
• CPC Class Codes: G11B 2005/0021 Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
• CPC Class Codes: G11B 5/012 Recording on, or reproducing or erasing from, magnetic disks G11B17/00, G11B19/00 take precedence
• CPC Class Codes: G11B 5/657 containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound containing oxygen G11B5/658
• CPC Class Codes: G11B 5/7368 Non-polymeric layer under the lowermost magnetic recording layer base layers having a non-magnetic layer under a soft magnetic layer G11B5/736; magnetic recording media substrates G11B5/739
• CPC Class Codes: G11B 5/7369 Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
• CPC Class Codes: G11B 5/737 Physical structure of underlayer, e.g. texture
• CPC Class Codes: G11B 5/7371 Non-magnetic single underlayer comprising nickel
• CPC Class Codes: G11B 5/7373 Non-magnetic single underlayer comprising chromium
• CPC Class Codes: G11B 5/7377 Physical structure of underlayer, e.g. texture
• CPC Class Codes: G11B 5/8404 manufacturing base layers
• CPC Class Codes: G11B 5/851 Coating a support with a magnetic layer by sputtering

Abstract

A magnetic recording medium of the present invention comprises an MgO layer 2, a first control layer 3, a second control layer 4, a magnetic layer 5, and a protective layer 6 which are provided in this order on a substrate 1. The MgO layer is formed by means of the ECR sputtering method. Accordingly, this layer is crystallized in the hexagonal system, and crystals are successfully oriented in a certain azimuth. Two or more layers of metal control layers are formed on the MgO layer by using materials and compositions so that the difference in lattice constant with respect to the magnetic layer is not more than 5%. Owing to the presence of the control layers, the magnetic layer is epitaxially grown in a well-suited manner while reflecting the structure of the MgO layer, making it possible to realize the orientation of (11.0) of Co which is preferred to perform the high density recording in the magnetic layer. Accordingly, it is possible to provide the magnetic recording medium capable of performing the super high density recording exceeding 40 Gbits/inch².

Claims

1. A magnetic recording medium comprising:

a substrate;

a magnetic layer which records information; and

a crystalline underlying layer which is positioned between the substrate and the magnetic layer, wherein;

the underlying layer is formed by generating plasma by resonance absorption, colliding the generated plasma with a target to sputter target particles, and depositing the sputtered target particles on the substrate while introducing the sputtered target particles onto the substrate by applying a bias voltage between the substrate and the target.

2. The magnetic recording medium according to claim 1, further comprising a control layer composed of metal, the control layer being provided between the underlying layer and the magnetic layer.

3. The magnetic recording medium according to claim 2, wherein the underlying layer is composed of magnesium oxide.

4. The magnetic recording medium according to claim 3, wherein the control layer is composed of at least two layers, each of the at least two control layers is composed of metal, and a difference between a lattice constant of the magnetic layer and a lattice constant of each of the control layers becomes smaller as the control layer is disposed closer to the magnetic layer.

5. The magnetic recording medium according to claim 4, wherein the control layer of the at least two layers of the control layers, which contacts with the underlying layer, is further formed by generating plasma by resonance absorption, colliding the generated plasma with a target to sputter target particles, and depositing the sputtered target particles on the underlying layer while introducing the sputtered target particles onto the underlying layer by applying a bias voltage between the substrate and the target.

6. The magnetic recording medium according to claim 4, wherein each of the at least two layers of the control layers is composed of Cr, Ni, Cr alloy, or Ni alloy.

7. The magnetic recording medium according to claim 6, wherein the Cr alloy or the Ni alloy contains at least one selected from the group consisting of Cr, Ti, Ta, V, Ru, W, Mo, Nb, Ni, Zr, and Al, in addition to the base element.

8. The magnetic recording medium according to claim 4, wherein each of the at least two layers of the control layers has an hcp structure, a bcc structure, or B2 structure.

9. The magnetic recording medium according to claim 8, wherein each of the at least two layers of the control layers is subjected to crystalline orientation in a certain azimuth.

10. The magnetic recording medium according to claim 8, wherein crystal grains of the underlying layer and each of the at least two layers of the control layers are grown in a pillar-shaped form in a film thickness direction respectively.

11. The magnetic recording medium according to claim 10, wherein crystal lattice connection is formed between the respective layers in a plane perpendicular to a substrate surface, of the underlying layer and each of the at least two layers of the control layers.

12. The magnetic recording medium according to claim 4, wherein the respective layers of the underlying layer and each of the at least two layers of the control layers have thicknesses of not less than 2 nm, and the underlying layer and the at least two layers of the control layers have a total thickness of not more than 50 nm.

13. The magnetic recording medium according to claim 4, wherein the magnetic layer is epitaxially grown from a top of the control layer contacting with the magnetic layer, of the at least two layers of the control layers.

14. The magnetic recording medium according to claim 13, wherein the difference is not more than 5% between the lattice constant of the magnetic layer and the lattice constant of the control layer contacting with the magnetic layer, of the at least two layers of the control layers.

15. The magnetic recording medium according to claim 13, wherein at least one, which is selected from the group consisting of a density, surface flatness, an azimuth of crystal growth, a crystal structure, grain diameters, and a grain diameter distribution of the magnetic layer, is controlled by forming the underlying layer and the at least two layers of the control layers.

16. The magnetic recording medium according to claim 15, wherein crystalline orientation of magnetic grains in the magnetic layer is controlled by the underlying layer.

17. The magnetic recording medium according to claim 16, wherein the crystalline orientation of the magnetic grains resides in (11.0) of Co.

18. The magnetic recording medium according to claim 15, wherein the grain diameters of magnetic grains in the magnetic layer are not more than 10 nm in diameter as approximated to circles, and a standard deviation in the magnetic grain diameter distribution is not more than 8% of an average grain diameter.

19. The magnetic recording medium according to claim 3, wherein the underlying layer, which is composed of magnesium oxide, is optically transparent.

20. The magnetic recording medium according to claim 19, wherein the underlying layer has a film thickness within a range of 2 nm to 10 nm.

21. The magnetic recording medium according to claim 20, wherein the control layer is composed of Cr, Ni, Cr alloy, or Ni alloy.

22. The magnetic recording medium according to claim 21, wherein the Cr alloy or the Ni alloy contains at least one selected from the group consisting of Cr, Ti, Ta, V, Ru, W, Mo, Nb, Ni, Zr, and Al, in addition to the base element.

23. The magnetic recording medium according to claim 19, wherein the control layer is composed of a single layer which has a film thickness within a range of 2 nm to 10 nm.

24. The magnetic recording medium according to claim 19, wherein the control layer is composed of a plurality of layers having mutually different compositions, and each of the layers has a film thickness within a range of 2 nm to 10 nm.

25. The magnetic recording medium according to claim 22, wherein the control layer contacts with the magnetic layer, and the control layer has an hcp crystal structure.

26. The magnetic recording medium according to claim 1, wherein the underlying layer is composed of metal.

27. The magnetic recording medium according to claim 26, wherein the underlying layer is composed of Cr, Ni, Cr alloy, or Ni alloy.

28. The magnetic recording medium according to claim 27, wherein the Cr alloy or the Ni alloy contains at least one selected from the group consisting of Cr, Ti, Ta, V, Ru, W, Mo, Nb, Ni, Zr, and Al, in addition to the base element.

29. The magnetic recording medium according to claim 26, wherein the underlying layer has a bcc structure or a B2 structure.

30. The magnetic recording medium according to claim 29, wherein the underlying layer is subjected to crystalline orientation in a certain azimuth.

31. The magnetic recording medium according to claim 29, wherein crystal grains existing in the underlying layer are grown in a direction perpendicular to a substrate surface.

32. The magnetic recording medium according to claim 29, wherein a number of crystal grains existing around one crystal grain in the underlying layer is 5.9 to 6.1.

33. The magnetic recording medium according to claim 26, wherein the underlying layer has a film thickness of 2 nm to 10 nm.

34. The magnetic recording medium according to claim 26, wherein the underlying layer is composed of two or more layers.

35. The magnetic recording medium according to claim 26, wherein the magnetic layer contains a crystalline phase, and the crystalline phase is composed of cobalt alloy principally containing Co and further containing at least one element selected from the group consisting of Cr, Pt, Ta, Nb, Ti, Si, B, P, Pd, V, Tb, Gd, Sm, Nd, Dy, Ho, and Eu.

36. The magnetic recording medium according to claim 26, wherein the magnetic layer is composed of a crystalline phase and an amorphous phase, and the amorphous phase exists to surround the crystalline phase.

37. The magnetic recording medium according to claim 36, wherein the amorphous phase is composed of Co or alloy principally containing Co, the alloy containing at least one element selected from the group consisting of Nd, Pr, Y, La, Sm, Gd, Tb, Dy, Ho, Pt, and Pd, and the amorphous phase being formed of at least one compound selected from the group consisting of silicon oxide, aluminum oxide, titanium oxide, zinc oxide, and silicon nitride.

38. The magnetic recording medium according to claim 26, wherein the magnetic layer is epitaxially grown from a top of the underlying layer.

39. The magnetic recording medium according to claim 38, wherein crystalline orientation of the magnetic layer is controlled by the underlying layer.

40. The magnetic recording medium according to claim 39, wherein the crystalline orientation of the magnetic layer resides in (11.0) of Co or (10.0) of Co.

41. The magnetic recording medium according to claim 38, wherein at least one, which is selected from the group consisting of a density, surface flatness, an azimuth of crystal growth, a crystal structure, and grain diameters and a grain diameter distribution of magnetic grains in the magnetic layer, is controlled by the underlying layer.

42. The magnetic recording medium according to claim 41, wherein the magnetic grain diameters and organization of the magnetic layer are equivalent to crystal grain diameters and organization of the underlying layer respectively.

43. The magnetic recording medium according to claim 41, wherein a standard deviation in the magnetic grain diameter distribution of the magnetic layer is not more than 8% of an average grain diameter.

44. The magnetic recording medium according to claim 2, wherein the underlying layer is composed of metal.

45. The magnetic recording medium according to claim 44, wherein the substrate is provided with an amorphous adhesive layer, and the underlying layer is formed on the amorphous adhesive layer.

46. The magnetic recording medium according to claim 44, wherein the underlying layer has a crystal structure of body-centered tetragonal lattice (bct), body-centered cubic lattice (bcc), or NaCl type.

47. The magnetic recording medium according to claim 44, wherein the control layer has a crystal structure of bct or bcc, and the control layer is epitaxially grown from the underlying layer.

48. The magnetic recording medium according to claim 46, wherein the underlying layer has the structure of bct or bcc, the control layer has a crystal structure of bcc, the underlying layer and the control layer have substantially identical crystalline orientation, and (211) planes or (100) planes of the underlying layer and the control layer are substantially parallel to a substrate surface.

49. The magnetic recording medium according to claim 48, wherein a relationship of L₁≦

L₂ is satisfied provided that L₁ represents a lattice length of the underlying layer in an in-plane direction in a crystal plane parallel to the substrate surface, and L₂ represents a lattice length of the control layer in an in-plane direction in a crystal plane parallel to the substrate surface.

50. The magnetic recording medium according to claim 49, wherein Δ

L≦

15% is given provided that Δ

L=(L₂−

L₁)/L₁ is given.

51. The magnetic recording medium according to claim 46, wherein the control layer is formed of a material selected from the group consisting of Ni—

Al two-element alloy, three-element or multi-element alloy containing major component of Ni—

Al, Cr simple substance, and Cr alloy containing major component of Cr and further containing at least one selected from the group consisting of V, Mo, W, Nb, Ti, Ta, Ru, Zr, and Hf.

52. The magnetic recording medium according to claim 48, further comprising a second control layer disposed between the magnetic layer and the control layer, wherein the second control layer has an hcp crystal structure.

53. The magnetic recording medium according to claim 44, wherein the second control layer is formed of one selected from the group consisting of:

(a) a simple substance element of Ru or Ti;

(b) a two-element alloy containing a major component of Co added with Cr or Ru; and

(c) an alloy containing, in the two-element alloy, at least one selected from the group consisting of Ta, Pt, Pd, Ti, Y, Zr, Nb, Mo, W, and Hf.

54. The magnetic recording medium according to claim 52, wherein the magnetic layer is epitaxially grown from the second control layer, the magnetic layer and the second control layer have substantially identical crystalline orientation, and (10.0) planes or (11.0) planes of the magnetic layer and the second control layer are substantially parallel to a substrate surface.

55. The magnetic recording medium according to claim 52, wherein relationships of a₁≧

a₂ and c₁≧

c₂ are simultaneously satisfied provided that a₁ represents a length of an a-axis and c₁ represents a length of a c-axis of crystal lattice of the magnetic layer, and a₂ represents a length of an a-axis and c₂ represents a length of a c-axis of crystal lattice of the second control layer.

56. The magnetic recording medium according to claim 52, wherein Δ

a≦

10% and Δ

c≦

10% are satisfied provided that a₁ represents a length of an a-axis and c₁ represents a length of a c-axis of crystal lattice of the magnetic layer, a₂ represents a length of an a-axis and c₂ represents a length of a c-axis of crystal lattice of the second control layer, and differences in length between the a-axes and the c-axes of the crystal lattices of the magnetic layer and the second control layer are defined to be Δ

a=(a₁−

a₂)/a₂ and Δ

c=(c₁−

c₂)/c₂ respectively.

57. The magnetic recording medium according to claim 44, wherein a (211) plane is preferentially oriented in the underlying layer and the control layer, and a (10.0) plane is preferentially oriented in the magnetic layer.

58. The magnetic recording medium according to claim 44, wherein a (100) plane is preferentially oriented in the underlying layer and the control layer, and a (11.0) plane is preferentially oriented in the magnetic layer.

59. The magnetic recording medium according to claim 52, wherein a (211) plane is preferentially oriented in the underlying layer and the control layer, and a (10.0) plane is preferentially oriented in the second control layer and the magnetic layer.

60. The magnetic recording medium according to claim 52, wherein a (100) plane is preferentially oriented in the underlying layer and the control layer, and a (11.0) plane is preferentially oriented in the second control layer and the magnetic layer.

61. The magnetic recording medium according to claim 44, wherein the magnetic layer and the control layer contain Cr, and a relationship of C(Cr)₁<

C(Cr)₂ is satisfied provided that C(Cr)₁ (atomic %) represents a concentration of Cr in the magnetic layer, and C(Cr)₂ (atomic %) represents a concentration of Cr in the control layer.

62. The magnetic recording medium according to claim 52, wherein the magnetic layer and the second control layer contain Cr, and a relationship of C(Cr)₁<

C(Cr)₃ is satisfied provided that C(Cr)₁ (atomic %) represents a concentration of Cr in the magnetic layer, and C(Cr)₃ (atomic %) represents a concentration of Cr in the second control layer.

63. The magnetic recording medium according to claim 52, wherein the magnetic layer and the second control layer contain Pt, and a relationship of C(Pt)₁<

C(Pt)₃ is satisfied provided that C(Pt)₁ (atomic %) represents a concentration of Pt in the magnetic layer, and C(Pt)₃ (atomic %) represents a concentration of Pt in the second control layer.

64. The magnetic recording medium according to claim 44, wherein the magnetic layer is composed of alloy principally containing Co and further containing at least one element selected from the group consisting of Cr, Pt, Ta, Nb, Ti, Si, B, P, Pd, V, Tb, Gd, Sm, Nd, Dy, Eu, Ho, Ge, Mo, Cu, and W, in addition to Co.

66. The magnetic recording medium according to claim 64, wherein the magnetic layer contains Cr, and Cr is unevenly distributed in the magnetic layer.

67. The magnetic recording medium according to claim 66, wherein the magnetic layer further contains at least one element selected from the group consisting of Ti, Si, B, P, Ta, and Nb.

68. The magnetic recording medium according to claim 67, wherein Cr in the magnetic layer exists in a grain boundary or in the vicinity of the grain boundary of magnetic grains of the magnetic layer.

69. The magnetic recording medium according to claim 1, wherein the magnetic layer has a film thickness of 2 nm to 10 nm.

70. The magnetic recording medium according to claim 33, wherein the control layer has a film thickness of 2 nm to 10 nm, and the underlying layer and the control layer have a total film thickness of not more than 25 nm.

71. The magnetic recording medium according to claim 52, wherein the second control layer has a film thickness of 2 nm to 10 nm, and the underlying layer, the control layer, and the second control layer have a total film thickness of not more than 25 nm.

72. The magnetic recording medium according to claim 1, further comprising a protective layer.

80. A magnetic recording apparatus comprising:

the magnetic recording medium as defined in claim 1;

a magnetic head which records or reproduces information on the magnetic recording medium; and

a driving unit which drives the magnetic recording medium with respect to the magnetic head.

81. The magnetic recording apparatus according to claim 80, wherein the magnetic recording medium is a magnetic disk, and the driving unit is provided with a rotary shaft which coaxially supports and rotates the magnetic disk or magnetic disks.

82. The magnetic recording apparatus according to claim 81, wherein an areal recording density of the magnetic disk is above 40 Gbits/inch².

83. The magnetic recording apparatus according to claim 80, wherein the underlying layer is composed of magnesium oxide which is optically transparent, and the magnetic recording apparatus further comprises an optical head which radiates a light beam onto the magnetic recording medium.

84. The magnetic recording apparatus according to claim 83, wherein information is recorded or erased by applying a magnetic field with the magnetic head while heating the magnetic recording medium by radiating the light beam onto the magnetic recording medium with the optical head when information is recorded.

85. The magnetic recording apparatus according to claim 84, wherein the optical head radiates a laser beam which is focused on the magnetic layer of the magnetic recording medium.

86. The magnetic recording apparatus according to claim 84, wherein the optical head radiates a pulsed light beam onto the magnetic recording medium.

87. The magnetic recording apparatus according to claim 86, wherein the magnetic head applies a pulsed magnetic field to the magnetic recording medium in synchronization with the pulsed light beam.

88. The magnetic recording apparatus according to claim 87, wherein the magnetic head has a recording frequency of not less than 30 MHz.

89. The magnetic recording apparatus according to claim 87, wherein a recording magnetic domain is formed so that the recording magnetic domain, which is formed on a track of the magnetic recording medium, has a width in a track direction narrower than a gap width of the magnetic head.

65. The magnetic recording medium according to claim, wherein the magnetic layer is formed of a material containing a major component of Co, and the magnetic layer has a crystal structure of hexagonal close-packed lattice (hcp).

73. A method for producing a magnetic recording medium, wherein the magnetic recording medium comprises:

a substrate;

a magnetic layer which records information; and

a crystalline underlying layer which is positioned between the substrate and the magnetic layer, the method comprising;

generating plasma by resonance absorption;

colliding the generated plasma with a target to sputter target particles; and

depositing the sputtered target particles on the substrate while introducing the sputtered target particles onto the substrate by applying a bias voltage between the substrate and the target to form the underlying layer.

74. The method for producing the magnetic recording medium according to claim 73, wherein:

the magnetic recording medium further comprises a control layer disposed between the magnetic layer and the underlying layer, and the control layer is formed by;

generating plasma by resonance absorption;

colliding the generated plasma with a target to sputter target particles; and

depositing the sputtered target particles on the underlying layer while introducing the sputtered target particles onto the underlying layer by applying a bias voltage between the substrate and the target.

75. The method for producing the magnetic recording medium according to claim 73, wherein a microwave is used for the resonance absorption.

76. The method for producing the magnetic recording medium according to claim 74, wherein the plasma is generated by electron, and the electron is excited by electron cyclotron resonance.

77. The method for producing the magnetic recording medium according to claim 74, wherein the bias voltage is applied by a DC power source or a radio frequency AC power source.

78. The method for producing the magnetic recording medium according to claim 75, wherein the underlying layer and the control layer make contact with each other, and mass transfer is suppressed at an interface between the underlying layer and the control layer.

79. The method for producing the magnetic recording medium according to claim 78, wherein crystal defect is reduced in the control layer and the underlying layer.