Gyroscope and fabrication method thereof
First Claim
1. A gyroscope comprising:
- a driving fixed electrode being fixed;
a driving displacement electrode being opposite to the driving fixed electrode, and being able to be displaced in a first direction;
an inertial mass being connected to the driving displacement electrode, being displaced in the first direction according to the first directional displacement of the driving displacement electrode, and being displaced in a second direction when an angular rate is applied;
a sensing displacement electrode being connected to the inertial mass, and being able to be displaced in the second direction according to the second directional displacement of the inertial mass; and
a sensing fixed electrode being opposite to the sensing displacement electrode and being fixed.
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Abstract
A gyroscope which comprises: a driving fixed electrode (26) being fixed; a driving displacement electrode (24) being opposite to the driving fixed electrode, and being able to be displaced in a first direction; an inertial mass (23) being connected to the driving displacement electrode (24), being displaced in the first direction according to the first directional displacement of the driving displacement electrode (24), and being displaced in a second direction when an angular rate is applied; a sensing displacement electrode (22) being connected to the inertial mass (23), and being able to be displaced in the second direction according to the second directional displacement of the inertial mass (23); and a sensing fixed electrode (25) being opposite to the sensing displacement electrode and being fixed. The driving displacement electrode (24) is supported by a folded spring (31) movable in the first direction, and the sensing displacement electrode is supported by a folded spring (32) movable in the second direction.
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Citations
14 Claims
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1. A gyroscope comprising:
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a driving fixed electrode being fixed;
a driving displacement electrode being opposite to the driving fixed electrode, and being able to be displaced in a first direction;
an inertial mass being connected to the driving displacement electrode, being displaced in the first direction according to the first directional displacement of the driving displacement electrode, and being displaced in a second direction when an angular rate is applied;
a sensing displacement electrode being connected to the inertial mass, and being able to be displaced in the second direction according to the second directional displacement of the inertial mass; and
a sensing fixed electrode being opposite to the sensing displacement electrode and being fixed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for fabricating a gyroscope comprising:
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(a) performing anodic bonding on a silicon substrate and a glass substrate;
(b) etching and polishing the silicon substrate to be a predetermined thickness;
(c) forming a metallic layer on the silicon substrate;
(d) performing photolithography on the metallic layer and the silicon substrate to form a silicon structure having a gyroscope pattern;
(e) etching the glass substrate, and separating remaining portions of the silicon structure except a fixture shaft from the glass substrate to form a gyroscope structure; and
(f) performing flip chip bonding on the gyroscope structure to connect it to an external circuit. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification