Rotation speed sensor
First Claim
11. (New) A yaw-rate sensor, comprising:
- a substrate;
a first coriolis element;
a second coriolis element;
an excitation arrangement to induce the first coriolis element and the second coriolis element to oscillate parallel to a first axis;
a detection arrangement to verify a deflection of the first coriolis element and the second coriolis element based on a coriolis force in a second axis that is perpendicular to the first axis, the first axis and the second axis being parallel to the surface of the substrate; and
a coupling spring to connect the first coriolis element and the second coriolis element to each other, and that is yielding in the first axis and in the second axis;
wherein the first coriolis element and the second coriolis are arranged side-by-side and above a surface of the substrate.
1 Assignment
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Accused Products
Abstract
A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.
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Citations
20 Claims
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11. (New) A yaw-rate sensor, comprising:
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a substrate;
a first coriolis element;
a second coriolis element;
an excitation arrangement to induce the first coriolis element and the second coriolis element to oscillate parallel to a first axis;
a detection arrangement to verify a deflection of the first coriolis element and the second coriolis element based on a coriolis force in a second axis that is perpendicular to the first axis, the first axis and the second axis being parallel to the surface of the substrate; and
a coupling spring to connect the first coriolis element and the second coriolis element to each other, and that is yielding in the first axis and in the second axis;
wherein the first coriolis element and the second coriolis are arranged side-by-side and above a surface of the substrate. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification