Device having inductors and capacitors and a fabrication method thereof
First Claim
1. An LC device, comprising:
- a substrate;
a support layer having an upper side and a lower side formed on the substrate, the upper side and lower side of the support layer being opposite each other;
inductors formed on either the upper side or the lower side of the support layer; and
capacitors formed on the side of the support layer that is opposite the side on which the inductors are formed.
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Abstract
An LC device having a substrate, a support layer having upper and lower sides formed on the substrate, inductors formed on either the upper or lower side of the support layer, and capacitors formed in the opposite side of the support layer. The support layer may be formed of a low-k dielectric material, and a connection portion may be provided to connect the inductors and capacitors in the support layer. The inductors and capacitors are disposed in a stacked structure on the upper and lower sides of the low-k dielectric support layer on the substrate, so that space efficiency may be maximized on the substrate. The low-k dielectric support layer provides support between the inductors and capacitors so that substrate loss is minimized and a Q factor of the inductors is enhanced.
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Citations
15 Claims
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1. An LC device, comprising:
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a substrate;
a support layer having an upper side and a lower side formed on the substrate, the upper side and lower side of the support layer being opposite each other;
inductors formed on either the upper side or the lower side of the support layer; and
capacitors formed on the side of the support layer that is opposite the side on which the inductors are formed. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for fabricating an LC device comprising:
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forming either inductors or capacitors in a substrate;
forming a support layer having an upper side and a lower side on the substrate in which either the inductors or the capacitors are formed; and
forming in the upper side of the support layer inductors if capacitors were previously formed in the substrate or capacitors if inductors were previously formed in the substrate. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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Specification