Piezoelectric actuator and electronic device having the same

• US 20030168942A1
• Filed: 01/09/2003
• Published: 09/11/2003
• Est. Priority Date: 01/16/2002
• Status: Abandoned Application

• Current Assignee: Akihiro Iino, Masao Kasuga, Satoshi Watanabe
• Original Assignee: Akihiro Iino, Masao Kasuga, Satoshi Watanabe
• Inventors: Watanabe, Satoshi, Iino, Akihiro, Kasuga, Masao
• Application Number:
  US10/339,070
• Publication Number:
  US 20030168942A1
• Time in Patent Office: Days
• US Class Current: 310/331
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3526 the optical element being a lens
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: H10N 30/2043 connected at their free ends, e.g. parallelogram type
• CPC Class Codes: H10N 30/2044 having multiple segments mechanically connected in series, e.g. zig-zag type

Abstract

To provide an actuator that has a compact structure and a large driving force and is not affected by a disturbance such as vibrations and environmental conditions such as temperature or humidity. A piezoelectric actuator according to the present invention uses a piezoelectric element which is small in size and large in generative force as a driving source so that a bending displacement is generated, and a member to be driven is supported at a point where an angular displacement thereof is maximum, or a force couple is given to a support point of the member to be driven to obtain a large displacement. In addition, the driving mechanism is structured by a combined mechanism that can be rotatably driven with respect to two axes that cross each other, to realize a mechanism that is capable of directing the member to be driven in a desired direction.

Claims

1. A piezoelectric actuator, comprising:

a first piezoelectric member which is partially fixed and displaced in a first direction;

a second piezoelectric member which is connected to the first piezoelectric member and displaced in a second direction, the piezoelectric actuator driving a member to be driven which is fixed to the second piezoelectric member.

2. A piezoelectric actuator, comprising two pairs of piezoelectric actuators as claimed in claim 1, wherein the piezoelectric actuators drive members to be driven which are supported by respective second piezoelectric members.

12. An electronic device with the piezoelectric actuator as claimed in claim 1, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

13. An electronic device with the piezoelectric actuator as claimed in claim 2, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

3. A piezoelectric actuator in which two piezoelectric members with a unimorph or bimorph structure are flush with each other and formed integrally with each other, and one end of the integrally formed members is fixed and the other end thereof is fixed to a member to be driven, and in which the two piezoelectric members are displaced in reverse directions to give a twist displacement to the member to be driven with a boundary between the two piezoelectric members used as a rotary axis.

7. A piezoelectric actuator in which a frame is driven by the piezoelectric actuator as claimed in claim 3, and a piezoelectric actuator which is different in a rotational direction from the piezoelectric actuator and has the same type as that of the piezoelectric actuator is attached onto the frame, to allow a member to be driven which is attached to the piezoelectric actuator to rotate about different two axes.

14. An electronic device with the piezoelectric actuator as claimed in claim 3, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

18. An electronic device with the piezoelectric actuator as claimed in claim 7, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

4. A piezoelectric actuator in which a bending displacement is generated in a strip-shaped piezoelectric member having both ends fixed, and the driving portion is supported on a boundary at which a direction of the bending displacement is reversed, and a member to be driven is rotatably driven in a direction of the bending displacement.

8. A piezoelectric actuator in which a frame is driven by the piezoelectric actuator as claimed in claim 4, and a piezoelectric actuator which is different in a rotational direction from the piezoelectric actuator and has the same type as that of the piezoelectric actuator is attached onto the frame, to allow a member to be driven which is attached to the piezoelectric actuator to rotate about different two axes.

15. An electronic device with the piezoelectric actuator as claimed in claim 4, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

19. An electronic device with the piezoelectric actuator as claimed in claim 8, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

5. A piezoelectric actuator comprising at least two pairs of rod-shaped piezoelectric members that have one ends thereof fixed and conduct expansion and contraction operation in a longitudinal direction, the other ends of the piezoelectric members being connected to different portions of a member to be driven to give a force couple to the member to be driven.

9. A piezoelectric actuator in which a frame is driven by the piezoelectric actuator as claimed in claim 5, and a piezoelectric actuator which is different in a rotational direction from the piezoelectric actuator and has the same type as that of the piezoelectric actuator is attached onto the frame, to allow a member to be driven which is attached to the piezoelectric actuator to rotate about different two axes.

16. An electronic device with the piezoelectric actuator as claimed in claim 5, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

6. A piezoelectric actuator comprising:

two strip-shaped piezoelectric members of unimorph or bimorph which are arranged in parallel with each other in a longitudinal direction and connected to each other, wherein one end sides thereof are fixed, and a voltage is applied to the piezoelectric members so that warps of the piezoelectric members become reverse to each other in such a manner that one piezoelectric member becomes convex and the other piezoelectric member becomes concave, to produce a twist motion at the other ends of the piezoelectric members.

10. A piezoelectric actuator in which a frame is driven by the piezoelectric actuator as claimed in claim 6, and a piezoelectric actuator which is different in a rotational direction from the piezoelectric actuator and has the same type as that of the piezoelectric actuator is attached onto the frame, to allow a member to be driven which is attached to the piezoelectric actuator to rotate about different two axes.

17. An electronic device with the piezoelectric actuator as claimed in claim 6, wherein a member to be driven comprises an optical device selected from the group consisting of a mirror, a lens, a fiber and a prism which determines an optical path direction.

11. A piezoelectric actuator in which:

one pair of U-shaped unimorph or bimorph type piezoelectric members have both ends connected to each other into a ring shape, center portions of the pair of piezoelectric members that face each other being fixed to fixing members through shaft members, respectively; and

another pair of U-shaped unimorph or bimorph type piezoelectric members have both ends connected to each other into a ring shape, center portions of the other pair of piezoelectric members that face each other being fixed to joint portions of the one pair of piezoelectric members through shaft members, respectively, to form an inner frame, in which shafts at both end portions of a member to be driven are attached to the joint portions of the inner frame.