REACTION FRAME FOR A WAFER SCANNING STAGE WITH ELECTROMAGNETIC CONNECTIONS TO GROUND

• US 20030169412A1
• Filed: 03/08/2002
• Published: 09/11/2003
• Est. Priority Date: 03/08/2002
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J.
• Application Number:
  US10/094,532
• Publication Number:
  US 20030169412A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Abstract

Methods and apparatus for isolating vibrations associated induced by reaction forces and ground vibration are disclosed. According to one aspect of the present invention, a scanning stage apparatus includes a stage base, a stage, a driver, and a reaction frame. The stage moves over the stage base in a first translational direction, a second translational direction, and a first rotational direction. The driver causes the stage to move, and also causes at least one reaction force to be created when the stage moves. The reaction frame at least partially supports the driver, and along with the driver, is substantially decoupled from the stage base. The reaction force is arranged to be transmitted to the reaction frame. The electromagnetic coupling electromagnetically couples the reaction frame to a ground, and provides a stiffness and a damping between the reaction frame and the ground.

Claims

1. A scanning stage apparatus comprising:

a stage base;

a stage, the stage being arranged to move over the stage base, wherein the stage is arranged to move in a first translational direction, a second translational direction, and a first rotational direction;

a driver, the driver being arranged to cause the stage to move, the driver further being arranged to cause at least one reaction force to be created when the stage moves;

a reaction frame, the reaction frame being arranged to at least partially support the driver, the reaction frame and the driver being substantially decoupled from the stage base, wherein the at least one reaction force is arranged to be transmitted to the reaction frame; and

an electromagnetic coupling, the electromagnetic coupling being arranged to electromagnetically couple the reaction frame to a ground, wherein the electromagnetic coupling is arranged to provide a stiffness and a damping between the reaction frame and the ground.

2. The scanning stage apparatus of claim 1 wherein the stiffness and the damping are adjustable.

3. The scanning stage apparatus of claim 2 wherein the stiffness and the damping are automatically adjustable, further including:

a sensor, the sensor being arranged to determine a measurement associated with the reaction frame, the sensor being coupled to the electromagnetic coupling, wherein the measurement is arranged to be used to automatically adjust the stiffness and the damping.

4. The scanning stage apparatus of claim 2 wherein the stiffness and the damping are adjusted to reduce vibrations which are transmitted from the ground to the reaction frame.

5. The scanning stage apparatus of claim 2 wherein the stiffness and the damping are adjusted to reduce vibrations which are induced within the reaction frame.

6. The scanning stage apparatus of claim 1 wherein the electromagnetic coupling is one of an electromagnetic actuator, a linear motor, an EI core motor, and a voice coil motor.

7. The scanning stage apparatus of claim 1 wherein the at least one reaction force includes a reaction force in the first translational direction, and the electromagnetic coupling is arranged to couple the reaction force to the ground along the first translational direction.

8. An exposure apparatus comprising the scanning apparatus of claim 1.

9. A device manufactured with the exposure apparatus of claim 8.

10. A wafer on which an image has been formed by the exposure apparatus of claim 8.

15. The stage assembly of claim 10 wherein the actuator is arranged to reduce vibrations induced within the reaction frame.

16. The stage assembly of claim 10 wherein the actuator is arranged to reduce vibrations transmitted to the reaction frame from the ground surface.

17. The stage assembly of claim 10 wherein the actuator is one of an electromagnetic actuator, a linear motor, an EI-core motor, and a voice coil motor.

11. A stage assembly comprising:

a stage base;

a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;

a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, and at least one reaction force is created with respect to the at least one of the three associated degrees of freedom;

a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame; and

an actuator, the actuator being arranged to be coupled between the reaction frame and a ground surface, the actuator having a stiffness and a damping, the actuator further being arranged to reduce a transmission of vibrations through the reaction frame.

12. The stage assembly of claim 11 wherein the stiffness and the damping are adjustable.

13. The stage assembly of claim 12 further including a control system, the control system being arranged to adjust the stiffness and the damping to compensate for changes in the vibrations.

14. The stage assembly of claim 13 wherein the control system is arranged to adjust the stiffness and the damping to control a parameter associated with the actuator, the parameter being one of a distance and a velocity associated with the actuator.

18. An exposure apparatus comprising the stage assembly of claim 11.

19. A device manufactured with the exposure apparatus of claim 18.

20. A wafer on which an image has been formed by the exposure apparatus of claim 18.

21. A stage assembly comprising:

a stage base;

a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;

a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, a at least one reaction force is created;

a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame; and

a low-pass filter, the low-pass filter being arranged between the reaction frame and a ground surface, the low-pass filter being arranged to filter vibrations transmitted between the ground surface and the reaction frame through the low-pass filter.

22. The stage assembly of claim 21 wherein the low-pass filter is arranged to filter vibrations of a frequency that is higher than approximately ten Hertz.

23. The stage assembly of claim 21 wherein the low-pass filter has an associated damping and an associated stiffness, the associated damping and the associated stiffness being variable to compensate for changes in vibrations transmitted between through the low-pass filter.

24. The stage assembly of claim 23 wherein the low-pass filter is an electromagnetic actuator.

25. An exposure apparatus comprising the stage assembly of claim 21.

26. A device manufactured with the exposure apparatus of claim 25.

27. A wafer on which an image has been formed by the exposure apparatus of claim 25.

28. A frame structure, the frame structure being suitable for use in a scanning apparatus, the frame structure comprising:

a body, the body being arranged to support a driving mechanism that is arranged to drive a stage, wherein the body is further arranged to substantially absorb a reaction force generated by the driving mechanism when the driving mechanism drives the stage; and

an electromagnetic actuator, the electromagnetic actuator having a stiffness and a damping, the electromagnetic actuator being coupled to the body, wherein the electromagnetic actuator is arranged to couple the body to a ground surface to reduce the affects of vibrations induced within the body.