REACTION FRAME FOR A WAFER SCANNING STAGE WITH ELECTROMAGNETIC CONNECTIONS TO GROUND
First Claim
1. A scanning stage apparatus comprising:
- a stage base;
a stage, the stage being arranged to move over the stage base, wherein the stage is arranged to move in a first translational direction, a second translational direction, and a first rotational direction;
a driver, the driver being arranged to cause the stage to move, the driver further being arranged to cause at least one reaction force to be created when the stage moves;
a reaction frame, the reaction frame being arranged to at least partially support the driver, the reaction frame and the driver being substantially decoupled from the stage base, wherein the at least one reaction force is arranged to be transmitted to the reaction frame; and
an electromagnetic coupling, the electromagnetic coupling being arranged to electromagnetically couple the reaction frame to a ground, wherein the electromagnetic coupling is arranged to provide a stiffness and a damping between the reaction frame and the ground.
1 Assignment
0 Petitions
Accused Products
Abstract
Methods and apparatus for isolating vibrations associated induced by reaction forces and ground vibration are disclosed. According to one aspect of the present invention, a scanning stage apparatus includes a stage base, a stage, a driver, and a reaction frame. The stage moves over the stage base in a first translational direction, a second translational direction, and a first rotational direction. The driver causes the stage to move, and also causes at least one reaction force to be created when the stage moves. The reaction frame at least partially supports the driver, and along with the driver, is substantially decoupled from the stage base. The reaction force is arranged to be transmitted to the reaction frame. The electromagnetic coupling electromagnetically couples the reaction frame to a ground, and provides a stiffness and a damping between the reaction frame and the ground.
-
Citations
28 Claims
-
1. A scanning stage apparatus comprising:
-
a stage base;
a stage, the stage being arranged to move over the stage base, wherein the stage is arranged to move in a first translational direction, a second translational direction, and a first rotational direction;
a driver, the driver being arranged to cause the stage to move, the driver further being arranged to cause at least one reaction force to be created when the stage moves;
a reaction frame, the reaction frame being arranged to at least partially support the driver, the reaction frame and the driver being substantially decoupled from the stage base, wherein the at least one reaction force is arranged to be transmitted to the reaction frame; and
an electromagnetic coupling, the electromagnetic coupling being arranged to electromagnetically couple the reaction frame to a ground, wherein the electromagnetic coupling is arranged to provide a stiffness and a damping between the reaction frame and the ground. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 15, 16, 17)
-
-
11. A stage assembly comprising:
-
a stage base;
a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;
a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, and at least one reaction force is created with respect to the at least one of the three associated degrees of freedom;
a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame; and
an actuator, the actuator being arranged to be coupled between the reaction frame and a ground surface, the actuator having a stiffness and a damping, the actuator further being arranged to reduce a transmission of vibrations through the reaction frame. - View Dependent Claims (12, 13, 14, 18, 19, 20)
-
-
21. A stage assembly comprising:
-
a stage base;
a stage, the stage being arranged to slide with respect to the stage base, wherein the stage has three associated degrees of freedom;
a motor, the motor being arranged to cause the stage to slide with respect to at least one of the three associated degrees of freedom, wherein when the motor causes the stage to slide with respect to the at least one of the three associated degrees of freedom, a at least one reaction force is created;
a frame, the frame being arranged to support at least a portion of the motor, the frame being substantially mechanically decoupled from the stage base to substantially prevent the at least one reaction force from affecting the stage, wherein the at least one reaction force is arranged to be imparted on the frame; and
a low-pass filter, the low-pass filter being arranged between the reaction frame and a ground surface, the low-pass filter being arranged to filter vibrations transmitted between the ground surface and the reaction frame through the low-pass filter. - View Dependent Claims (22, 23, 24, 25, 26, 27)
-
-
28. A frame structure, the frame structure being suitable for use in a scanning apparatus, the frame structure comprising:
-
a body, the body being arranged to support a driving mechanism that is arranged to drive a stage, wherein the body is further arranged to substantially absorb a reaction force generated by the driving mechanism when the driving mechanism drives the stage; and
an electromagnetic actuator, the electromagnetic actuator having a stiffness and a damping, the electromagnetic actuator being coupled to the body, wherein the electromagnetic actuator is arranged to couple the body to a ground surface to reduce the affects of vibrations induced within the body.
-
Specification