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Microelectromechanical system with stiff coupling

  • US 20030173865A1
  • Filed: 03/14/2002
  • Published: 09/18/2003
  • Est. Priority Date: 03/14/2002
  • Status: Active Grant
First Claim
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1. A microelectromechanical system that comprises:

  • a substrate;

    a lever movably interconnected with said substrate at a first location and comprising a first free lever end that is displaced from said first location and moveable relative to said substrate;

    an actuator assembly interconnected with said substrate for movement along a first path; and

    an elongate coupling comprising a first coupling end interconnected with said actuator assembly and a second coupling end interconnected with said lever, wherein said actuator assembly generates an actuation force to move said first free lever end relative to said substrate, respectively, by a movement of said actuator assembly along said first path, wherein a buckle strength of said elongate coupling between said first and second coupling ends is greater than a maximum magnitude of a component of said actuation force that is along said first path.

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