Method and apparatus to measure fiber optic pickup errors in interferometry systems

• US 20030174340A1
• Filed: 02/12/2003
• Published: 09/18/2003
• Est. Priority Date: 02/12/2002
• Status: Active Grant

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A.
• Granted Patent: US 7,030,994 B2
• Time in Patent Office: Days
• US Class Current: 356/496
• CPC Class Codes: G01B 2290/60 Reference interferometer, i.e. additional interferometer not interacting with object
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02059 Reducing effect of parasitic reflections, e.g. cyclic errors

Abstract

Methods and apparatus for characterizing and compensating non-cyclic errors in fiber optic pickups in interferometry systems are disclosed.

Claims

1. A method comprising:

using a fiber optic pickup comprising an input coupler and a fiber to couple two input beams derived from a common source into the fiber to produce an output beam, wherein the output beam comprises information about an optical path length difference between the two input beams,

wherein imperfections in the fiber optic pickup cause a measurable interferometric test phase derived from the output beam to deviate from the expression Φ

=pknL, where p is an integer, k is the wavenumber of the output beam, and nL corresponds to the optical path length difference, wherein the deviation comprises a non-cyclic error term that varies as a function of a separation of one or both of the input beams from an axis of the input coupler;

measuring the test phase while varying the separation of at least one of the input beams from the axis;

comparing the measured test phase to a reference phase indicative of the optical path difference; and

determining a representation indicative of the non-cyclic error term for the fiber optic pickup based on the comparison.

2. The method of claim 1, wherein the reference phase corresponds to the test phase measured when both the input beams are coincident with the axis.

3. The method of claim 1, wherein varying the-separation of at least one of the input beams from the axis comprises varying the separation between the two input beams.

4. The method of claim 1, wherein varying the separation of at least one of the input beams from the axis comprises varying the separation of both input beams from the axis as the separation between the input beams is kept constant.

5. The method of claim 1, wherein the test phase is measured while varying the separation between the two input beams and the wherein the test phase is further measured while varying the separation of both input beams from the axis as the separation between the input beams is kept constant.

6. The method of claim 1, further comprising separating a progenitor beam into two components, directing the two components along different paths, and then recombining the two components to produce an intermediate beam, wherein the two components of the intermediate beam correspond to the two input beams incident on the fiber optic pickup.

7. The method of claim 6, wherein varying the separation of at least one of the input beams from the axis comprises varying at least one of the different paths to translate one of the components in the intermediate beam.

8. The method of claim 7, wherein varying at least one of the different paths comprises translating a mirror used to direct one of the components.

9. The method of claim 6, further comprising using a Mach-Zender interferometer to separate the progenitor beam, direct the two components along the different paths, and recombine the components.

10. The method of claim 4, wherein varying the separation of both input beams from the axis as the separation between the input beams is kept constant comprises translating the input coupler with respect to the input beams.

11. The method of claim 1, wherein the input coupler comprises a focusing element that focuses the two input beams onto a core of the fiber.

12. The method of claim 11, wherein the input coupler further comprises a polarizer that samples a common polarization state of the two input beams.

13. The method of claim 1, further comprising rotating the input coupler with respect to the axis and determining the representation for different rotation angles.

14. The method of claim 1, wherein the two input beams have orthogonal polarizations.

15. The method of claim 1, wherein the common source causes the two input beams to have a heterodyne frequency splitting.

16. The method of claim 1, wherein the two input beam spatially overlap one another upon entering the fiber optic pickup.

17. The method of claim 1, wherein the axis is parallel to the two input beams.

18. The method of claim 1, wherein the representation correlates a value for the non-cyclic error term as a function of one or more correlation parameters that depends on the separation of one or both of the input beams from an axis of the input coupler.

19. The method of claim 18, wherein at least one of the correlation parameters depends on the separation between the two input beams.

20. The method of claim 19, wherein at least one of the correlation parameters depends on the separation of both input beams from the axis as the separation between the input beams is kept constant.

21. The method of claim 18, wherein the representation is a lookup table.

22. The method of claim 18, wherein the representation is an algebraic expression parameterized by the one or more correlation parameters.

23. An apparatus comprising:

a fiber optic pickup including an input coupler and a fiber configured to couple two input beams derived from a common source into the fiber to produce an output beam,

wherein the output beam comprises information about an optical path length difference between the two input beams,

wherein imperfections in the fiber optic pickup cause a measurable interferometric phase derived from the output beam to deviate from the expression Φ

=pknL, where p is an integer, k is the wavenumber of the output beam, and nL corresponds to an optical path length difference between the component beams, wherein the deviation comprises a non-cyclic error term that varies depending on a separation of one or both of the component beams from an axis of the input coupler; and

an electronic storage medium providing a representation indicative of the non-cyclic error term for the fiber optic pickup.

24. The apparatus of claim 23, further comprising an electronic controller configured to couple to the electronic storage medium, wherein during operation the electronic controller corrects the interferometric phase derived from the output beam of the fiber optic pickup based on the representation in the electronic storage medium.

25. The apparatus of claim 23, wherein the input coupler comprises a focusing element configured to focus the two input beams to a core of the fiber.

26. The apparatus of claim 25, wherein the input coupler further comprises a polarizer configured to sample a common polarization state of the two input beams.

27. A lithography system for use in fabricating integrated circuits on a wafer, the system comprising:

a stage for supporting the wafer;

an illumination system for imaging spatially patterned radiation onto the wafer;

a positioning system for adjusting the position of the stage relative to the imaged radiation; and

an interferometry system including the apparatus of claim 23 for monitoring the position of the wafer relative to the imaged radiation.

28. A lithography system for use in fabricating integrated circuits on a wafer, the system comprising:

a stage for supporting the wafer; and

an illumination system including a radiation source, a mask, a positioning system, a lens assembly, and an interferometry system including the apparatus of claim 23,

wherein during operation the source directs radiation through the mask to produce spatially patterned radiation, the positioning system adjusts the position of the mask relative to the radiation from the source, the lens assembly images the spatially patterned radiation onto the wafer, and the interferometer and apparatus monitors the position of the mask relative to the radiation from the source.

29. A beam writing system for use in fabricating a lithography mask, the system comprising:

a source providing a write beam to pattern a substrate;

a stage supporting the substrate;

a beam directing assembly for delivering the write beam to the substrate;

a positioning system for positioning the stage and beam directing assembly relative one another; and

an interferometry system including the apparatus of claim 23 for monitoring the position of the stage relative to the beam directing assembly.

37. A method for fabricating integrated circuits, the method comprising using the lithography system of claim 27.

38. A method for fabricating integrated circuits, the method comprising using the lithography system of claim 28.

30. A method comprising:

positioning an interferometer relative to a measurement object, wherein during operation of the interferometer directs two beams along different paths and then combines them to produce an output beam, wherein at least one of the beams contacts the measurement object and the output beam comprises information about an optical path length difference between the two beams;

transporting the output beam with a fiber optic pickup to a detector positioned at a location remote from the interferometer,

wherein imperfections in the fiber optic pickup cause a measurable interferometric phase derived from the output beam to deviate from the expression Φ

=pknL, where p is an integer, k is the wavenumber of the output beam, and nL corresponds to the optical path length difference, wherein the deviation comprises a non-cyclic error term that depends on the separation of the output beam components from an axis of the fiber optic pickup;

correcting the measured phase based on a representation indicative of the non-cyclic error term for the fiber optic pickup; and

monitoring the position of the measurement object based on the corrected phase.

31. A lithography method for use in fabricating integrated circuits on a wafer, the method comprising:

supporting the wafer on a moveable stage;

imaging spatially patterned radiation onto the wafer;

adjusting the position of the stage; and

monitoring the position of the stage using the method of claim 30.

32. A lithography method for use in the fabrication of integrated circuits comprising:

directing input radiation through a mask to produce spatially patterned radiation;

positioning the mask relative to the input radiation;

monitoring the position of the mask relative to the input radiation using the method of claim 30;

and

imaging the spatially patterned radiation onto a wafer.

33. A lithography method for fabricating integrated circuits on a wafer comprising:

positioning a first component of a lithography system relative to a second component of a lithography system to expose the wafer to spatially patterned radiation; and

monitoring the position of the first component relative to the second component using the method of claim 30.

34. A method for fabricating integrated circuits, the method comprising the lithography method of claim 31.

35. A method for fabricating integrated circuits, the method comprising the lithography method of claim 32.

36. A method for fabricating integrated circuits, the method comprising the lithography method of claim 33.

39. A method for fabricating a lithography mask, the method comprising:

directing a write beam to a substrate to pattern the substrate;

positioning the substrate relative to the write beam; and

monitoring the position of the substrate relative to the write beam using the method of claim 30.