Optical switch device
First Claim
1. An optical switch device comprising at least:
- an optical switch element constituted by a fixed electrode portion arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed, a mirror structure having a plate-shaped movable portion arranged above said fixed electrode portion while opposing said fixed electrode portion, a reflecting portion which is formed at least at part of said movable portion to reflect light, and a support member which is fixed around said fixed electrode portion on the semiconductor substrate via a dielectric layer and supports said mirror structure; and
a driving control circuit which is incorporated in the integrated circuit to drive said optical switch element by applying a predetermined potential to said movable portion and said fixed electrode portion.
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Accused Products
Abstract
An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.
23 Citations
9 Claims
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1. An optical switch device comprising at least:
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an optical switch element constituted by a fixed electrode portion arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed, a mirror structure having a plate-shaped movable portion arranged above said fixed electrode portion while opposing said fixed electrode portion, a reflecting portion which is formed at least at part of said movable portion to reflect light, and a support member which is fixed around said fixed electrode portion on the semiconductor substrate via a dielectric layer and supports said mirror structure; and
a driving control circuit which is incorporated in the integrated circuit to drive said optical switch element by applying a predetermined potential to said movable portion and said fixed electrode portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification