Method for collecting remote maintenance and diagnostic data from subject equipment, other device and manufacturing execution system

• US 20030176989A1
• Filed: 03/12/2003
• Published: 09/18/2003
• Est. Priority Date: 03/12/2002
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Matsuda, Katsuhiko
• Granted Patent: US 7,035,768 B2
• Time in Patent Office: Days
• US Class Current: 702/184
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31205 Remote transmission of measured values from site, local to host
• CPC Class Codes: G05B 2219/31282 Data acquisition, BDE MDE
• CPC Class Codes: G05B 2219/32235 Sharing of data between process control and maintenance management computers
• CPC Class Codes: G05B 2219/33284 Remote diagnostic
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.

Claims

1. A method for collecting data used for a remote maintenance and diagnosis of a manufacturing equipment, the method comprising the steps of:

collecting data deriving from the manufacturing equipment being a subject of the remote maintenance and diagnosis, data deriving from a manufacture related equipment other than said manufacturing equipment, and data regarding a manufacturing execution; and

transmitting the data collected in the step of collecting to a remote center performing the maintenance and diagnosis of said manufacturing equipment.

2. The method as claimed in claim 1, wherein said data regarding said manufacturing execution is acquired from a manufacturing execution system.

3. The method as claimed in claim 1, wherein said data deriving from said manufacturing equipment, said data deriving from said manufacture related equipment, and said data regarding said manufacturing execution are collected and transmitted to said remote center in response to a request from said remote center.

4. The method as claimed in claim 1, wherein said data deriving from said manufacturing equipment is collected by a data controlling device connected communicably to said manufacturing equipment and said remote center, and is transmitted to said remote center via said data controlling device.

5. The method as claimed in claim 1, wherein the data to be transmitted to said remote center is collected by a data controlling device in response to a request from said remote center, and is transmitted to said remote center from said data controlling device, the data controlling device being connected communicably to said remote center and receiving said request from said remote center.

6. A system for collecting data used for a remote maintenance and diagnosis of a manufacturing equipment, the system comprising:

the manufacturing equipment situated at a user site;

manufacture related equipments situated at said user site;

a manufacturing execution system situated at said user site;

a data collecting and transmitting part situated at said user site; and

a remote center remotely maintaining and diagnosing said manufacturing equipment,

wherein said remote center is connected communicably to said user site so as to make a request to said user site for data necessary for maintaining and diagnosing said manufacturing equipment, and to receive the necessary data collected at said user site from said user site, and

said data collecting and transmitting part collects data deriving from said manufacturing equipment, data deriving from said manufacture related equipments, and manufacturing execution data acquired from said manufacturing execution system, and transmits said data deriving from said manufacturing equipment, said data deriving from said manufacture related equipments, and said manufacturing execution data to said remote center as said necessary data in response to said request from said remote center.

7. The system as claimed in claim 6, wherein said data collecting and transmitting part is incorporated in a group controller controlling said manufacturing equipment.

8. The system as claimed in claim 6, wherein said manufacture related equipments include at least one of a manufacturing equipment other than said manufacturing equipment to be maintained and diagnosed, and a testing equipment.

9. A system for collecting data used for a remote maintenance and diagnosis of a manufacturing equipment, the system comprising:

the manufacturing equipment situated at a user site;

a data collecting and transmitting part situated at said user site; and

a remote center remotely maintaining and diagnosing said manufacturing equipment,

wherein said remote center is connected communicably to said user site so as to make a request to said user site for data necessary for maintaining and diagnosing said manufacturing equipment, and to receive the necessary data collected at said user site from said user site, and

said data collecting and transmitting part collects data deriving from said manufacturing equipment, data deriving from a manufacture related equipment other than said manufacturing equipment, and manufacturing execution data acquired from a manufacturing execution system, and transmits said data deriving from said manufacturing equipment, said data deriving from said manufacture related equipment, and said manufacturing execution data to said remote center as said necessary data in response to said request from said remote center.

10. The system as claimed in claim 9, wherein said data collecting and transmitting part is incorporated in a group controller controlling said manufacturing equipment.

11. A system for collecting data used for a remote maintenance and diagnosis of a manufacturing equipment, the system comprising:

the manufacturing equipment situated at a user site, and remotely maintained and diagnosed by a remote center;

a manufacture related equipment situated at said user site, the manufacture related equipment producing data usable for said remote center to maintain and diagnose said manufacturing equipment;

a manufacturing execution system situated at said user site, the manufacturing execution system outputting manufacturing execution data usable for said remote center to maintain and diagnose said manufacturing equipment; and

a data collecting and transmitting part cooperating with said manufacture related equipment and said manufacturing execution system so as to collect data deriving from said manufacturing equipment, said data produced by said manufacture related equipment, and said manufacturing execution data output by said manufacturing execution system, and to transmit said data deriving from said manufacturing equipment, said data produced by said manufacture related equipment, and said manufacturing execution data to said remote center as data necessary for maintaining and diagnosing said manufacturing equipment, in response to a request from said remote center.

12. A remote center remotely maintaining and diagnosing a manufacturing equipment situated at a user site,

wherein said remote center is connected communicably to said user site so as to make a request to said user site for data necessary for maintaining and diagnosing said manufacturing equipment, and to receive data deriving from said manufacturing equipment, data deriving from a manufacture related equipment other than said manufacturing equipment, and data regarding a manufacturing execution from said user site.

13. A data controlling device connected communicably to a manufacturing equipment being a subject of a remote maintenance and diagnosis, and to a remote center maintaining and diagnosing said manufacturing equipment so as to acquire data produced by said manufacturing equipment, and to transmit maintenance and diagnostic data used for the maintenance and diagnosis of said manufacturing equipment to said remote center,

wherein said data controlling device acquires data produced by a manufacture related equipment related to said manufacturing equipment, and acquires data regarding a manufacturing execution from a manufacturing execution system, in response to a request from said remote center, and

said data controlling device collects said data produced by said manufacturing equipment, said data produced by said manufacture related equipment, and said data regarding said manufacturing execution as said maintenance and diagnostic data to be transmitted to said remote center.

14. A manufacturing execution system used for a manufacturing execution in a factory at which a manufacturing equipment subjected to a remote maintenance and diagnosis by a remote center is situated,

wherein said manufacturing execution system transmits data regarding a manufacturing execution, the data being included in data used for the maintenance and diagnosis of said manufacturing equipment, to said remote center via a data controlling device connected communicably to said remote center and said manufacturing execution system, in response to a request from said remote center.

15. A manufacture related equipment cooperating with a manufacturing equipment subjected to a remote maintenance and diagnosis by a remote center,

wherein said manufacture related equipment transmits process result data of said manufacture related equipment to said remote center via a data controlling device connected communicably to said remote center and said manufacture related equipment, in response to a request from said remote center.

16. A manufacturing equipment subjected to a remote maintenance and diagnosis by a remote center,

wherein said manufacturing equipment transmits data deriving from said manufacturing equipment to said remote center via a data controlling device connected communicably to said remote center and said manufacturing equipment, in response to a request from said remote center, and

data deriving from a manufacture related equipment other than said manufacturing equipment and data regarding a manufacturing execution are used together with said data deriving from said manufacturing equipment by said remote center for the remote maintenance and diagnosis of said manufacturing equipment.