Closed hole edge lift pin and susceptor for wafer process chambers
First Claim
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1. An apparatus, comprising:
- a susceptor having a plurality of through holes;
a plurality of lift pins each positioned within one of the plurality of through holes, each lift pin having a lift pin head capable of translating a wafer by contacting the wafer at the wafer outer diameter edge, the plurality of lift pins capable of extending to lift the wafer off the susceptor; and
the plurality of lift pins capable of lowering to place the wafer onto the susceptor, wherein upon placing the wafer onto the susceptor, each of the plurality of lift pin heads are capable of contacting a floor of the susceptor for restricting flow of a gas through the plurality of through holes.
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Abstract
An apparatus that includes a susceptor having a number of through holes, a number of lift pins positioned within the through holes, each lift pin having a lift pin head able to translate a wafer by contacting the wafer at an outer diameter edge, the lift pins capable of extending to lift the wafer off the susceptor; and the lift pins capable of retracting to place the wafer onto the susceptor, and upon placing the wafer onto the susceptor, each of the lift pin heads are capable of contacting a floor of the susceptor for restricting flow of a gas through the through holes.
285 Citations
33 Claims
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1. An apparatus, comprising:
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a susceptor having a plurality of through holes;
a plurality of lift pins each positioned within one of the plurality of through holes, each lift pin having a lift pin head capable of translating a wafer by contacting the wafer at the wafer outer diameter edge, the plurality of lift pins capable of extending to lift the wafer off the susceptor; and
the plurality of lift pins capable of lowering to place the wafer onto the susceptor, wherein upon placing the wafer onto the susceptor, each of the plurality of lift pin heads are capable of contacting a floor of the susceptor for restricting flow of a gas through the plurality of through holes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An apparatus, comprising:
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a susceptor having a plurality counterbore holes having a plurality of through holes positioned within;
the susceptor having a ledge positioned within a dished out center capable of supporting a wafer a plurality of lift pins positioned within the through holes, each lift pin having a lift pin head capable of translating the wafer by contacting the wafer at an outer diameter edge, the plurality of lift pins capable of extending to lift the wafer off the susceptor; and
the plurality of lift pins capable of retracting to place the wafer onto the susceptor, wherein upon placing the wafer onto the ledge, each of the plurality of lift pin heads are capable of contacting a floor of each of the plurality of couterbore holes for restricting flow of a gas through the plurality of counterbore holes. - View Dependent Claims (25, 26)
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27. An apparatus, comprising:
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a plurality of lift pins capable of translating a wafer by contacting the wafer near the wafer outer diameter edge;
a pin lift capable of moving the plurality of lift pins; and
means for reducing the contact area between the wafer and each of the plurality of lift pins during wafer translation. - View Dependent Claims (28, 29, 30, 31)
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32. A method, comprising:
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positioning the wafer on a plurality of pins extended in a direction, where the plurality of pins contact the wafer at the wafer outer diameter edge; and
translating the plurality of pins in an opposite direction until, each of the plurality of pins is positioned in a recess in a susceptor, and the plurality of pins are not in contact with the wafer. - View Dependent Claims (33)
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Specification