Coating process method and coating process apparatus

• US 20030180444A1
• Filed: 03/11/2003
• Published: 09/25/2003
• Est. Priority Date: 03/19/2002
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Fukuda, Yoshiteru, Minamida, Junya, Kometani, Yasuyuki, Takekuma, Takashi
• Application Number:
  US10/384,629
• Publication Number:
  US 20030180444A1
• Time in Patent Office: Days
• US Class Current: 427/8
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring

Abstract

A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film comprises the step of detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started, and the step of controlling based on a signal of the detection at least one of the driving timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.

Claims

1. A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising the steps of:

detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started and/or stopped; and

controlling the coating treatment on the basis of a signal of the detection.

2. The coating process method according to claim 1, wherein the start and/or stop of the discharging of the coating liquid is detected by using an optical sensor.

3. The coating process method according to claim 2, wherein the optical sensor includes an optical fiber sensor for projecting light and an optical fiber sensor for receiving light.

4. The coating process method according to claim 1, wherein the start and/or stop of the discharging of the coating liquid is detected by using a CCD camera.

5. The coating process method according to claim 1, wherein the start of the discharging of the coating liquid is detected when the coating liquid is discharged from the coating liquid discharging nozzle onto the target substrate.

6. The coating process method according to claim 1, wherein the start of the discharging of the coating liquid is detected when the coating liquid discharging nozzle discharges the coating liquid from a position retreated from the target substrate.

7. A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising the steps of:

detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started; and

controlling based on a signal of the detection at least one of the drive timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.

8. The coating process method according to claim 7, wherein, in the controlling step, a delay time from the timing of actually discharging the coating liquid is obtained based on the detected signal denoting that the discharging of the coating liquid has been started, and at least one of the drive timing of the pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the start or stop timing of the rotation of the target substrate is controlled based on the delay time from the timing of actually discharging the coating liquid.

9. The coating process method according to claim 7, wherein the stop of the discharging of the coating liquid is detected by using an optical sensor.

10. The coating process method according to claim 9, wherein the optical sensor includes an optical fiber sensor for projecting light and an optical fiber sensor for receiving light.

11. The coating process method according to claim 7, wherein the start of the discharging of the coating liquid is detected by using a CCD camera.

12. The coating process method according to claim 7, wherein the start of the discharging of the coating liquid is detected when the coating liquid is discharged from the coating liquid discharging nozzle onto the target substrate.

13. The coating process method according to claim 7, wherein the start of the discharging of the coating liquid is detected when the coating liquid discharging nozzle discharges the coating liquid from a position retreated from the target substrate.

14. A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising the steps of:

detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is stopped; and

controlling based on a signal of the detection at least one of the drive stop timing of a pump for allowing the coating liquid to cease to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation stop timing of the target substrate.

15. The coating process method according to claim 14, wherein, in the controlling step, a signal denoting that the discharging of the coating liquid from the coating liquid discharging nozzle has been actually started is obtained, and a delay time from the timing of actually discharging the coating liquid is obtained based on the detected signal so as to control based on the delay time at least one of the drive stop timing of a pump for allowing the coating liquid to cease to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation stop timing of the target substrate.

16. The coating process method according to claim 14, wherein the stop of the discharging of the coating liquid is detected by using an optical sensor.

17. The coating process method according to claim 16, wherein the optical sensor includes an optical fiber sensor for projecting light and an optical fiber sensor for receiving light.

18. The coating process method according to claim 14, wherein the stop of the discharging of the coating liquid is detected by using a CCD camera.

19. The coating process method according to claim 14, wherein the stop of the discharging of the coating liquid is detected when the coating liquid is discharged from the coating liquid discharging nozzle onto the target substrate.

20. The coating process method according to claim 14, wherein the stop of the discharging of the coating liquid is detected when the coating liquid discharging nozzle discharges the coating liquid from a position retreated from the target substrate.

21. A coating process apparatus in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising:

a substrate holding member for holding substantially horizontal a target substrate to be processed;

a motor for rotating the substrate holding member;

a coating liquid discharging nozzle for discharging a coating liquid onto the target substrate held by the substrate holding member;

a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle;

a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle;

a detecting device optically detecting that the discharging of the coating liquid from the coating liquid discharging nozzle has been started; and

a controller receiving a signal of the detection from the detecting device so as to control based on the detection signal at least one of the drive timing of the pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of the valve, and the drive starting or stopping timing of the motor.

22. The coating process apparatus according to claim 21, wherein the controller obtains a delay time from the timing of actually discharging the coating liquid based on the signal detected by the detecting device and controls based on the delay time at least one of the drive timing of the pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of the valve and the drive starting or stopping timing of the motor.

23. The coating process apparatus according to claim 21, wherein the detecting device includes an optical sensor.

24. The coating process apparatus according to claim 21, wherein the optical sensor includes an optical fiber sensor for projecting light and an optical fiber sensor for receiving light.

25. The coating process apparatus according to claim 21, wherein the detecting device includes a CCD camera.

26. The coating process apparatus according to claim 21, wherein the detecting device performs its detecting function when the coating liquid is discharged from the coating liquid discharging nozzle onto the target substrate.

27. The coating process apparatus according to claim 21, wherein the detecting device performs its detecting function when the coating liquid discharging nozzle discharges the coating liquid from a position retreated from the target substrate.

28. A coating process apparatus in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising:

a substrate holding member for holding substantially horizontal a target substrate to be processed;

a motor for rotating the substrate holding member;

a coating liquid discharging nozzle for discharging a coating liquid onto the target substrate held by the substrate holding member;

a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle;

a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle;

a detecting device for optically detecting that the discharging of the coating liquid from the coating liquid discharging nozzle has been finished; and

a controller receiving a signal of the detection from the detecting device so as to control based on the detected signal at least one of the drive stop timing of the pump for allowing the coating liquid to cease to be discharged from the coating liquid discharging nozzle, the operation timing of the valve, and the stop timing of the motor.

29. The coating process apparatus according to claim 28, wherein the controller obtains a delay time from the timing of actually discharging the coating liquid based on the signal detected by the detecting device and controls based on the delay time at least one of the drive stop timing of the pump for allowing the coating liquid to cease to be discharged from the coating liquid discharging nozzle, the operation timing of the valve and the drive starting or stop timing of the motor.

30. The coating process apparatus according to claim 28, wherein the detecting device includes an optical sensor.

31. The coating process apparatus according to claim 30, wherein the optical sensor includes an optical fiber sensor for projecting light and an optical fiber sensor for receiving light.

32. The coating process apparatus according to claim 28, wherein the detecting device includes a CCD camera.

33. The coating process apparatus according to claim 28, wherein the detecting device performs its detecting function when the coating liquid is discharged from the coating liquid discharging nozzle onto the target substrate.

34. The coating process apparatus according to claim 28, wherein the detecting device performs its detecting function when the coating liquid discharging nozzle discharges the coating liquid from a position retreated from the target substrate.

35. A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising the steps of:

actually detecting the state in starting and/or stopping the discharging of the coating liquid from a coating liquid discharging nozzle; and

controlling based on the data detected in the detecting step the operating speed of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle in a manner to permit the state in starting and/or stopping the discharging of the coating liquid to fall within an allowable range.

36. A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film, comprising the steps of:

detecting that the coating liquid is being actually discharged from the coating liquid discharging nozzle;

measuring the actual discharging time during which the discharging of the coating liquid was detected in the detecting step;

comparing the actual discharging time measured in the measuring step with the set time for the discharging of the coating liquid; and

judging that there is an abnormality in the case where the difference between the actual discharging time and the set time is not smaller than an allowable value.

37. A coating process apparatus, comprising:

a substrate holding member for holding substantially horizontal a target substrate to be processed;

a motor for rotating the substrate holding member;

a coating liquid discharging nozzle for discharging a coating liquid onto the target substrate held by the substrate holding member;

a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle;

a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle;

a detecting device for optically detecting the state in starting and/or stopping the discharging of the coating liquid from the coating liquid discharging nozzle; and

a controller for controlling based on the data detected by the detecting device the operating speed of the valve in a manner to permit the state in starting and/or stopping the discharging of the coating liquid to fall within an allowable range.

38. A coating process apparatus, comprising:

a substrate holding member for holding substantially horizontal a target substrate to be processed;

a motor for rotating the substrate holding member;

a coating liquid discharging nozzle for discharging a coating liquid onto the target substrate held by the substrate holding member;

a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle;

a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle;

a detecting device for optically detecting that the coating liquid is being actually discharged from the coating liquid discharging nozzle;

a timer for measuring the actual discharging time during which the discharging of the coating liquid is detected by the detecting device;

a controller for comparing the actual discharging time measured by the timer with the set time of the coating liquid discharging; and

judging that there is an abnormality in the case where the difference between the actual discharging time and the set time is not smaller than an allowable value.