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Micro inertia sensor and method of manufacturing the same

  • US 20030183009A1
  • Filed: 12/27/2002
  • Published: 10/02/2003
  • Est. Priority Date: 03/27/2002
  • Status: Active Grant
First Claim
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1. A micro inertia sensor comprising a lower glass substrate;

  • a lower silicon including a first border, a first fixed point and a side movement sensing structure;

    an upper silicon including a second border, a second fixed point being connected to a via hole, in which a metal wiring is formed, on an upper side, and a sensing electrode, which correspond to the first border, the first fixed point and the side movement sensing structure;

    a bonded layer by a eutectic bonding between the upper silicon and the lower silicon; and

    an upper glass substrate, being positioned on an upper portion of the upper silicon, for providing the via hole on which an electric conduction wiring is formed.

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