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In-situ local heating using megasonic transducer resonator

  • US 20030183246A1
  • Filed: 03/29/2002
  • Published: 10/02/2003
  • Est. Priority Date: 03/29/2002
  • Status: Active Grant
First Claim
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1. An apparatus for cleaning a semiconductor substrate, the apparatus comprising:

  • a transducer;

    a resonator configured to propagate energy from the transducer, the resonator having a top surface and a bottom surface, the top surface operatively coupled to the transducer, the bottom surface configured to provide localized heating while propagating the energy from the transducer.

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