Electromagnetically levitated substrate support

• US 20030183611A1
• Filed: 03/29/2002
• Published: 10/02/2003
• Est. Priority Date: 03/29/2002
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Gregor, Mariusch, Reimer, Peter, Seidl, Vincent
• Granted Patent: US 6,800,833 B2
• Time in Patent Office: Days
• US Class Current: 219/390
• CPC Class Codes: C30B 25/12 Substrate holders or susceptors
• CPC Class Codes: C30B 31/14 Substrate holders or susceptors
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft

Abstract

An apparatus for supporting a substrate and a method for positioning a substrate are provided. In one embodiment, an apparatus for supporting a substrate includes a substrate support, a stator circumscribing the substrate support, and an actuator. The actuator is coupled to the stator and adapted to change the elevation of the stator and/or adjust an angular orientation of the stator relative to its central axis. As the substrate support is magnetically coupled to the stator, a position, i.e., elevation and angular orientation, of the substrate support may be controlled.

Claims

1. Apparatus for supporting a substrate, comprising:

a substrate support;

a stator circumscribing and magnetically coupled to the substrate support; and

an actuator coupled to the stator.

2. The apparatus of claim 1 further comprising:

a second actuator coupled to the stator; and

a third actuator coupled to the stator, the first, second and third actuators arranged in a spaced-apart relationship.

3. The apparatus of claim 1, wherein the first actuator is an electric control motor, a stepper motor, a servo motor, a pneumatic cylinder, a hydraulic cylinder, a ball screw, a solenoids, a linear actuators or a cam and follower.

4. The apparatus of claim 1, wherein the first actuator is coupled to the stator by a coupling that allows relative movement between the first actuator and the stator.

5. The apparatus of claim 4, wherein the coupling provides motion along a first axis and a second axis that is orientated perpendicular to the first axis.

6. The apparatus of claim 1 further comprising a thermally reflective plate coupled to the substrate support.

7. The apparatus of claim 1, wherein the substrate support further comprises:

a support section having a support surface adapted to support the substrate; and

at least one post protruding from the support surface and defining at least one notch that extends into the support section.

8. The apparatus of claim 7, wherein the substrate support further comprises:

an annular magnetic section coupled to the support section.

9. The apparatus of claim 8, wherein the magnetic section further comprises:

a plurality of outwardly extending flanges disposed in a polar array about a centerline of the substrate support.

10. Apparatus for supporting a substrate, comprising:

an annular substrate support having a central axis;

a stator circumscribing and magnetically coupled to the substrate support;

a first actuator coupled to the stator, the first actuator adapted to move the stator along or change the angular orientation of the stator relative to the central axis;

a second actuator coupled to the stator; and

a third actuator coupled to the stator, the first, second and third actuators arranged in a spaced-apart relationship.

11. The apparatus of claim 10, wherein the first actuator is an electric control motor, a stepper motor, a servo motor, a pneumatic cylinder, a hydraulic cylinder, a ball screw, a solenoids, a linear actuators or a cam and follower.

12. The apparatus of claim 10, wherein the first actuator is coupled to the stator by a coupling that allows relative movement between the first actuator and the stator.

13. The apparatus of claim 12, wherein the coupling provides motion along a first axis and a second axis that is orientated perpendicular to the first axis.

14. The apparatus of claim 10 further comprising a thermally reflective plate coupled to the substrate support.

15. The apparatus of claim 10, wherein the substrate support further comprises:

a substrate support section having a support surface adapted to support the substrate; and

at least one post protruding from the support surface and defining at least one notch that extends into the substrate support section.

16. The apparatus of claim 15, wherein the substrate support further comprises:

an annular magnetic portion coupled to the support second; and

a plurality of flanges extending radially outward from the magnetic portion in a polar array about a centerline of the substrate support.

17. The apparatus of claim 15, wherein the flanges are permanent magnets.

18. A processing chamber comprising:

a chamber body defining an interior volume,

a substrate support disposed in the interior volume of the chamber body;

a stator circumscribing the chamber body and magnetically coupled to the substrate support; and

an actuator coupled to the stator.

19. The chamber of claim 18 further comprising:

a second actuator coupled to the stator; and

a third actuator coupled to the stator, the first, second and third actuators arranged in a spaced-apart relationship.

20. The chamber of claim 18 further comprising:

a lamp assembly coupled to a top of the chamber body and adapted to heat the interior volume of the chamber body.

21. The chamber of claim 18 further comprising:

an atmosphere control system coupled to the chamber body and adapted to provide deposition gases to the interior volume of the chamber body.

22. A method for positioning a substrate, comprising:

positioning a substrate disposed on a robot blade above a magnetically levitating substrate support;

elevating a stator magnetically coupled to the substrate support; and

lifting the substrate from the robot blade with the substrate support.

23. The method of claim 22, wherein the step of positioning the substrate above the substrate support further comprises:

passing the robot blade at least partially through a notch formed in the substrate support.

24. The method of claim 22, wherein the step of elevating the stator further comprises:

energizing at least a first actuator coupled to the stator.

25. The method of claim 22, wherein the step of elevating the stator further comprises:

energizing a plurality of actuators coupled to different angular positions on the stator to produce a stator along a central axis of the substrate support.

26. The method of claim 22, wherein the step of elevating the stator further comprises:

regulating an orientation of a plane defined by the substrate support relative to a central axis of the substrate support.

27. The method of claim 26, wherein the step of regulating further comprises:

energizing a first actuator coupled to the stator to move the stator a first distance; and

energizing a second actuator coupled to the stator to move the stator a second distance that is different than the first distance.

28. The method of claim 27, wherein the step of regulating further comprises:

determining distances between the substrate support and at least three sensors, and

energizing at least the first actuator to change the angular orientation of the plane defined by the substrate support relative to the central axis.

29. The method of claim 27, wherein the step of regulating further comprises:

moving of the plane defined by the substrate support to be perpendicular to the central axis.

30. The method of claim 22 further comprising:

rotating the substrate support by sequentially energizing coils disposed in the stator.

31. The method of claim 22 further comprising thermally processing the substrate.

32. A method for positioning a substrate, comprising:

providing a substrate in a substrate support; and

moving a stator magnetically coupled to the substrate support.

33. The method of claim 32, wherein the step of the stator further comprises:

changing a planar elevation of the substrate support.

34. The method of claim 33, wherein the step of changing the planar elevation of the substrate support further comprises:

regulating an orientation of a plane defined by the substrate support relative to a central axis of the substrate support.

35. The method of claim 32, wherein the step of moving the stator further comprises:

energizing at least one actuators coupled to the stator.

36. The method of claim 32, wherein the step of the stator further comprises:

changing an angular orientation of a plane of the substrate support.

37. The method of claim 36, wherein the step of changing the angular orientation further comprises:

energizing a first actuator coupled to the stator to move the stator a first distance; and

energizing a second actuator coupled to the stator to move the stator a second distance that is different than the first distance.

38. The method of claim 37, wherein the step of changing the angular orientation further comprises:

determining distances between the substrate support and at least three sensors, and

energizing at least the first actuator to change the angular orientation of the plane defined by the substrate support relative to the central axis.

39. The method of claim 32 further comprising:

rotating the substrate support by sequentially energizing coils disposed in the stator.

40. The method of claim 32 further comprising thermally processing the substrate.

41. A method for positioning a substrate, comprising:

providing a substrate support disposed in a process chamber;

magnetically levitating the substrate support; and

moving a stator along a central axis of the process chamber to control an elevation and/or orientation of the substrate support magnetically coupled thereto.

42. The method of claim 41, wherein the step of moving the stator further comprises:

energizing at least a first actuator coupled to the stator.

43. The method of claim 41, wherein the step of moving the stator further comprises:

energizing a plurality of actuators coupled to the stator to move the stator to a position along the central axis having an parallel stator orientation.

44. The method of claim 41 further comprising:

regulating an orientation of a plane defined by the substrate support relative to the central axis of the substrate support.

45. The method of claim 44, wherein the step of regulating further comprises:

energizing a first actuator coupled to the stator to move the stator a first distance; and

energizing a second actuator coupled to the stator to move the stator a second distance that is different than the first distance.

46. The method of claim 45, wherein the step of regulating further comprises:

determining distances between the substrate support and at least three sensors, and

energizing at least the first actuator to change the angular orientation of the plane defined by the substrate support relative to the central axis.

47. The method of claim 41 further comprising thermally processing the substrate.