Corrugated diaphragm
First Claim
Patent Images
1. A diaphragm comprising:
- a sheet of material formed on a substrate having a hole, the sheet of material covering the hole and including one or more corrugations that are substantially free of defects.
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Abstract
A diaphragm includes a substrate having a hole and a sheet of material formed on the substrate and covering the hole. The sheet of material includes one or more corrugations that are substantially free of defects. A method of forming the diaphragm includes forming a corrugated surface free of stringers on the substrate, forming a layer of material on the corrugated surface, and processing the substrate to form the diaphragm including the layer of material.
29 Citations
19 Claims
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1. A diaphragm comprising:
a sheet of material formed on a substrate having a hole, the sheet of material covering the hole and including one or more corrugations that are substantially free of defects. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of forming a diaphragm, comprising:
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forming a corrugated surface free of stringers on a substrate;
forming a layer of material on the corrugated surface; and
processing the substrate to form the diaphragm including the layer of material. - View Dependent Claims (11, 12, 13)
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14. A method of forming a diaphragm, comprising:
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etching a structure on a surface of a substrate;
forming a layer of silicon dioxide on the structure;
etching the layer of silicon dioxide; and
forming a layer of silicon nitride on the structure and processing the substrate to form the diaphragm from the layer of silicon nitride. - View Dependent Claims (15, 16)
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17. A method for detecting an acoustic wave comprising:
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receiving an acoustic wave at a diaphragm including a sheet of material formed on a substrate having a hole, the sheet of material covering the hole and including one or more corrugations that are substantially free of defects; and
detecting a deflection of the sheet of material. - View Dependent Claims (18, 19)
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Specification