Hermetic electric component package
First Claim
1. An electric component package comprising:
- a base having a first surface and a second surface opposite said first surface, said base comprising a dielectric material having at least one conductive via extending through said dielectric material between said first and second surfaces;
a component located adjacent said first surface of said base, said component having at least one port coupled to said at least one conductive via; and
a lid coupled to said first surface of said base, said lid and said base defining a sealed cavity therebetween, said sealed cavity sized to accommodate said component.
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Accused Products
Abstract
An electric component package having a base and a lid, the base and lid defining a hermetically sealed cavity therebetween for accommodating an electric component. The base includes at least one conductive via extending therethrough, allowing control and/or input/output (I/O) ports associated with the electric component to be coupled to the conducive vias to pass signals between the sealed cavity and the exterior of the package without passing through the junction between the base and lid. The electric component package can be produced at the wafer level using conventional silicon wafer integrated circuit manufacturing machinery prior to separating the wafer into a plurality of devices.
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Citations
41 Claims
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1. An electric component package comprising:
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a base having a first surface and a second surface opposite said first surface, said base comprising a dielectric material having at least one conductive via extending through said dielectric material between said first and second surfaces;
a component located adjacent said first surface of said base, said component having at least one port coupled to said at least one conductive via; and
a lid coupled to said first surface of said base, said lid and said base defining a sealed cavity therebetween, said sealed cavity sized to accommodate said component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for sealing a component within a package, said method comprising the steps of:
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(a) forming a base having a first surface and a second surface opposite said first surface, said base comprising a dielectric material having at least one conductive via extending between said first and second surfaces;
(b) establishing a component on said first surface of said base, said component having at least one port, said at least one port being coupled to said at least one conductive via;
(c) forming a lid; and
(d) coupling said lid to said first surface of said base, said lid and said base defining a cavity therebetween for accommodating said component. - View Dependent Claims (17, 18, 19, 20)
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21. A process for fabricating an electric component package having a sealed cavity for accommodating an electric component, comprising the steps of:
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etching a semiconductor base layer having first and second opposing surfaces to form at least one pedestal on said first surface;
applying a layer of dielectric material to said first surface of said etched semiconductor base layer;
grinding said dielectric layer to expose a surface of said at least one pedestal;
establishing an electric component on said ground dielectric layer, said electric component having at least one port coupled to said exposed surface of said at least one pedestal;
attaching a lid to said ground dielectric layer, said lid having a cavity for accommodating said electric component; and
grinding said semiconductor base layer on said second surface to expose said dielectric layer, said at least one pedestal forming a conductive via extending through said dielectric layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A process for fabricating an electric component package having a sealed cavity for accommodating an electric component, said process comprising the steps of:
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forming a substantially dielectric base having at least one conductive via;
establishing the electric component on said base, said electric component having at least one port electrically coupled to said at least one via;
forming a lid; and
attaching said lid to said base, said lid and said base defining a sealed cavity therebetween for accommodating the electric component. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41)
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Specification