Electrostatic bimorph actuator
First Claim
1. A microelectrical mechanical actuator, comprising:
- a planar substrate with an anchor secured thereto;
cantilevered flexible bimorph arm secured at one end to the anchor and extending along and over the substrate;
a substrate electrode secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm; and
activation electrical couplings to receive an electrical potential difference between the bimorph arm and the substrate electrode to impart electrostatic attraction between the bimorph arm and the substrate electrode, thereby to activate the actuator.
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Abstract
An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.
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Citations
28 Claims
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1. A microelectrical mechanical actuator, comprising:
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a planar substrate with an anchor secured thereto;
cantilevered flexible bimorph arm secured at one end to the anchor and extending along and over the substrate;
a substrate electrode secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm; and
activation electrical couplings to receive an electrical potential difference between the bimorph arm and the substrate electrode to impart electrostatic attraction between the bimorph arm and the substrate electrode, thereby to activate the actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. In a microelectrical mechanical actuator formed on a planar semiconductor substrate, the improvement comprising:
a cantilevered flexible bimorph arm that is secured to the planar substrate and selectively postionable in an relaxed state and in an electrostatically activated state, the bimorph arm being generally parallel to the planar substrate in the electrostatically activated state and extending out-of-plane from the planar substrate in the relaxed state. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A microelectrical mechanical actuator array, comprising:
a plurality of electrostatic bimorph microelectrical mechanical actuators that each have cantilevered flexible bimorph arm that is secured to a planar substrate and selectively postionable in an activated state and in a relaxed state, the bimorph arm being generally parallel to the planar substrate in the activated state and extending out-of-plane from the planar substrate in the relaxed state. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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26. A microelectrical mechanical actuator activation control method, comprising:
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selectively applying an activation potential difference between a cantilevered flexible bimorph arm that is secured to a planar substrate at one end and a substrate electrode that is secured to the substrate and positioned under and in alignment with the bimorph arm, the potential difference imparting an electrostatic attraction between the bimorph arm and the substrate electrode to hold the bimorph arm generally parallel to the planar substrate against a residual stress in the bimorph arm; and
selectively relaxing at least part of the activation potential difference to allow the residual stress in the bimorph arm to extend a free end out-of-plane and away from the planar substrate. - View Dependent Claims (27, 28)
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Specification