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Electrostatic bimorph actuator

  • US 20030184189A1
  • Filed: 03/29/2002
  • Published: 10/02/2003
  • Est. Priority Date: 03/29/2002
  • Status: Active Grant
First Claim
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1. A microelectrical mechanical actuator, comprising:

  • a planar substrate with an anchor secured thereto;

    cantilevered flexible bimorph arm secured at one end to the anchor and extending along and over the substrate;

    a substrate electrode secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm; and

    activation electrical couplings to receive an electrical potential difference between the bimorph arm and the substrate electrode to impart electrostatic attraction between the bimorph arm and the substrate electrode, thereby to activate the actuator.

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