Separated beam multiple degree of freedom interferometer
First Claim
1. Interferometric apparatus comprising:
- a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and
interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams, wherein the interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.
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Accused Products
Abstract
An interferometric apparatus includes: a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams. The interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.
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Citations
47 Claims
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1. Interferometric apparatus comprising:
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a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and
interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams, wherein the interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 36, 37, 38, 45, 46)
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35. An interferometric method comprising:
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separating an input beam into two orthogonally polarized beams;
directing each beam from a first set of beams derived from one of the orthogonally polarized beams to contact different locations of a measurement object at least once; and
subsequently combining each beam in the first set with a corresponding beam from a second set of beams derived from the other one of the orthogonally polarized beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom. - View Dependent Claims (39, 40, 41, 42, 43, 44, 47)
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Specification