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Separated beam multiple degree of freedom interferometer

  • US 20030186136A1
  • Filed: 02/11/2003
  • Published: 10/02/2003
  • Est. Priority Date: 02/12/2002
  • Status: Active Grant
First Claim
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1. Interferometric apparatus comprising:

  • a polarizing beam-splitting interface positioned to separate an input beam into two orthogonally polarized beams; and

    interferometer optics positioned to receive a first set of beams derived from one of the orthogonally polarized beams and a second set of beams derived from the other of the orthogonally polarized beams, wherein the interferometer optics are configured to direct each beam in the first set to contact different locations of a measurement object at least once, and subsequently combine each beam in the first set with a corresponding beam from the second set of beams to produce a corresponding output beam comprising information about changes in the position of the measurement object with respect to a different degree of freedom.

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