Installation for processing a semiconductor wafer and method for operating the installation

• US 20030187537A1
• Filed: 03/27/2003
• Published: 10/02/2003
• Est. Priority Date: 03/27/2002
• Status: Active Grant

• Current Assignee: Polaris Innovations Limited (Wi-LAN Inc.)
• Original Assignee: Qimonda AG (Infineon Technologies AG)
• Inventors: Kubart, Gregor, Lering, Michael, Hocke, Christoph
• Granted Patent: US 7,054,714 B2
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: H01L 21/67775 Docking arrangements

Abstract

An installation for processing a semiconductor wafer includes a semiconductor fabrication device having a load port, on which an identity code that can be read optically or through an effective electromagnetic field is stored. A mobile device, for example, a container communicating with the load port or a vehicle for transporting such a container, contains a corresponding reader to determine the identifier. The configuration makes the flexible determination of position within a fabrication facility possible. Also provided is a method for operating the installation.

Claims

1. An installation for processing a semiconductor wafer, comprising:

a device for processing the semiconductor wafer, said device having at least one loading device for supplying the semiconductor wafer;

said loading device having;

interface elements for coupling to a container adapted to transport the semiconductor wafer; and

an identification device storing an identity code representing said loading device and being fitted to said loading device; and

a mobile unit interacting with said identification device, said mobile unit registering said identity code and digitally storing and making available said identity code for further use.

2. The installation according to claim 1, wherein said identification device is applied to said loading device as an optically machine-readable marking.

3. The installation according to claim 1, wherein said identification device is an optically machine-readable marking.

4. The installation according to claim 1, wherein said identification device is applied to said loading device by a marking read through an electromagnetic field.

5. The installation according to claim 1, wherein said identification device is an electromagnetic field readable marking.

6. The installation according to claim 1, further comprising:

a transport device adapted to transport the container to said loading device; and

a reader fixed to said transport device and detecting said identity code.

7. The installation according to claim 6, wherein:

said transport device is a rail-guided transport system having rails and vehicles guided by said rails for transporting the container; and

said reader is fixed to at least one of said vehicles.

8. The installation according to claim 6, wherein:

said transport device is a vehicle for transporting the container by moving on a floor; and

said reader is fixed to the vehicle.

9. The installation according to claim 1, further comprising:

a further container removably coupled to said loading device through said interface elements, said further container having a signal processing device producing an output value; and

a reader fixed at said further container, said reader assigning said output value said identity code digitally provided by said loading device.

10. The installation according to claim 9, wherein said identification device is applied to a section of said loading device disposed opposite one side of said further container placed on said loading device.

11. The installation according to claim 10, wherein:

said interface elements have a carrier plate receiving thereon at least one of the container and said further container communicating with said loading device; and

said identification device is fixed to said carrier plate.

12. The installation according to claim 9, wherein:

said identification device is an optical identification device; and

at least one of the container and said further container has an image recording device recording said identity code from said loading device on which at least one of the container and said further container is placed.

13. The installation according to claim 12, wherein:

said image recording device has an optical sensor disposed within at least one of the container and said further container;

said interface elements have a carrier plate receiving thereon at least one of the container and said further container communicating with said loading device; and

said optical sensor lies immediately opposite said identification device when at least one of the container and said further container is placed on said carrier plate.

14. The installation according to claim 13, wherein at least one of the container and said further container has:

a baseplate with a hole accommodating said optical sensor; and

an image evaluation device determining said identity code from an optically received signal.

15. The installation according to claim 13, wherein:

at least one of the container and said further container has a measuring device for measuring contamination of the air; and

said reader determines said identity code associated with a contamination measuring operation and associated with a contamination value and stores said identity code temporarily in said signal processing device.

16. An installation for processing a semiconductor wafer, comprising:

a device for processing the semiconductor wafer, said device having at least one loading device for supplying the semiconductor wafer;

said loading device having;

interface elements for coupling to a container adapted to transport the semiconductor wafer; and

a means for identification fitted to said loading device, said identification means storing an identity code representing said loading device; and

a mobile unit interacting with said identification means, said mobile unit registering said identity code and digitally storing and making available said identity code for further use.

17. A method of operating an installation for processing a semiconductor wafer, which comprises:

providing a semiconductor wafer-processing device having at least one loading device supplying the semiconductor wafer to the processing device;

coupling a semiconductor wafer transporting container containing a measuring device to interface elements of the at least one loading device;

registering an identification applied to the at least one loading device by interacting a reader of a mobile unit with the identification and determining an identity code representing the at least one loading device;

operating the measuring device and determining a digital measured value; and

assigning, with the mobile unit the measured value to the identity code determined and storing the measured value and the identifier, associated with each other, in a temporary memory contained in the container.

18. The method according to claim 17, which further comprises:

opening a door of the processing device; and

measuring a parameter of air contained in the processing device and storing a measured value in association with the identity code determined.

19. A method of operating an installation, which comprises:

coupling a container containing a measuring device to an interface of a loading device of a semiconductor wafer-processing device;

registering an identification applied to the loading device by interacting a reader with the identification and determining an identity code representing the loading device;

operating the measuring device and determining a digital measured value; and

assigning the digital measured value to the identity code determined and storing the digital measured value and the identity code associated with each other in a temporary memory contained in the container.

20. The method according to claim 19, which further comprises:

opening a door of the processing device; and

measuring a parameter of air contained in the processing device and storing a measured value in association with the identity code determined.