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Nanowire devices and methods of fabrication

  • US 20030189202A1
  • Filed: 04/05/2002
  • Published: 10/09/2003
  • Est. Priority Date: 04/05/2002
  • Status: Abandoned Application
First Claim
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1. A nanowire device comprising:

  • a substrate;

    a plurality of corresponding patterned electrodes on the substrate;

    a plurality of catalyst sites on each of the patterned electrodes;

    a plurality of corresponding nanowires grown from the catalyst sites; and

    a dielectric material deposited on the nanowires such that the dielectric material fills at least some volume between adjacent nanowires, enhances the strength of the nanowires, and provides electrical insulation between the nanowires, wherein the dielectric material is planarized to form a planarized surface at which tips of the nanowires are located.

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