Piezoelectric optical relay

• US 20030189773A1
• Filed: 03/28/2002
• Published: 10/09/2003
• Est. Priority Date: 03/28/2002
• Status: Active Grant

• Current Assignee: Avago Technologies ECBU IP Singapore Pte Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Granted Patent: US 6,741,767 B2
• Time in Patent Office: Days
• US Class Current: 359/824
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/355 1x2 switch, i.e. one input and a selectable single output of two possible outputs
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131

Abstract

The present invention uses the deflection of a piezoelectric element to move an optical element into contact with the face of an optical path to redirect an optical signal. In its undeflected state, the optical signal is reflected from the angled face of the optical path by internal reflection. When the piezoelectric actuator moves the optical element into contact with the angled face of the optical path, the index of refraction of the optical path is matched and the optical signal enters the optical element and passes through.

Claims

1. A piezoelectric optical relay comprising:

a piezoelectric element;

a diaphragm having a first and a second side, said first side abutting said piezoelectric element;

an optical path comprising an entry point, a first egression point, a second egression point and a divergence point, said divergence point comprising a notch in said path; and

an optical element affixed to said second side;

wherein said optical element is moveable into said notch.

2. The piezoelectric optical relay of claim 1 further comprising a chamber wherein said piezoelectric element, said diaphragm, said optical element and said divergence point are with said chamber.

3. The piezoelectric optical relay of claim 2 wherein said chamber comprises a first and second ledge and said diaphragm extends between said first and said second ledge and said diaphragm is affixed to said first and said second ledge.

4. The piezoelectric optical relay of claim 3 wherein sad first and said second ledge are oriented so that said ledges face the optical path.

5. The piezoelectric optical relay of claim 4 wherein said piezoelectric element is a bending mode piezoelectric element.

6. The piezoelectric optical relay of claim 5 wherein said piezoelectric element is laminated to said diaphragm.

7. The piezoelectric optical relay of claim 6 wherein said optical element is triangular.

8. The piezoelectrical optical relay of claim 7 wherein said optical element is coated with a substance so that the index of refraction substantially matches the optical path.

9. The piezoelectric optical relay of claim 8 wherein said substance is from the group comprising metal oxides, semiconductor oxides, metal nitrides, or semiconductor nitrides, or combinations thereof.

10. The piezoelectric optical relay of claim 8 wherein said substance acts as a filter.

11. The piezoelectric optical relay of claim 9 wherein said diaphragm is from the group comprising stainless steel, brass, beryllium copper, spring steel, ceramic, or polymer.

12. A method of actuating an optical relay, said optical relay comprising an optical path having a first and second egressing paths and a notch, a point of divergence, an optical element and a chamber, wherein said method comprises the steps of:

causing said optical element to move into said notch.

13. The method of actuating an optical relay of claim 12, wherein said step of causing said optical element to move into said notch comprises bending a diaphragm, said diaphragm being in contact with said optical element.

14. The method of actuating an optical relay of claim 13, wherein moving said diaphragm comprises causing a piezoelectric element to deflect, said piezoelectric element being in contact with said diaphragm.

15. The method of actuating an optical relay of claim 14, wherein said notch is triangular and said notch is coated to match the index of refraction of the optical path.

16. The method of actuating an optical relay of claim 15, wherein said notch is coated with a substance from the group comprising metal oxides, semiconductor oxides, metal nitrides, or semiconductor nitrides, or combinations thereof

17. The method of actuating an optical relay of claim 16, wherein said diaphragm is constructed of a material from the group comprising stainless steel, brass, beryllium copper, spring steel, ceramic, or polymer.

18. The method of actuating an optical relay of claim 17, wherein said piezoelectric element is a bending mode piezoelectric element.

19. A piezoelectric optical relay comprising:

an optical path having a notch and a first and a second signal out path, said notch being located at a point where the first and second signal out paths converge;

an optical element situated to be inserted into said notch;

a diaphragm abutting a side of the optical element opposite said notch;

a piezoelectric element abutting a side of said diaphragm opposite said optical element;

wherein said optical element is moveable into said notch.

20. The piezoelectric optical relay of claim 19, further comprising a chamber wherein said notch, said optical element, said diaphragm and said piezoelectric element are positioned inside said chamber.

21. The piezoelectric optical relay of claim 20, wherein said diaphragm is attached to the sidewalls of said chamber.

22. The piezoelectric optical relay of claim 21, wherein said chamber has a first and second ledge.

23. The piezoelectric optical relay of claim 22 wherein said diaphragm is attached to said first and said second ledge.

24. A piezoelectric optical relay comprising:

a top cap layer;

an optical layer situated below said top cap layer, and a

bottom cap layer situated below said optical layer,

wherein said optical layer comprises a piezoelectric element,

a diaphragm having a first and a second side, said first side abutting said piezoelectric element,

an optical path comprising an entry point, a first egression port, a second egression portand a divergence point, said divergence point comprising a notch in said path, and

an optical element affixed to said second side of said diaphragm;

wherein said optical element is moveable into said notch.

25. The piezoelectric optical relay of claim 24 further comprising a chamber wherein said piezoelectric element, said diaphragm, said optical element and said divergence point are with said chamber.

26. The piezoelectric optical relay of claim 25 wherein said optical element is moveable into said notch due to flexing action of the diaphragm and wherein said diaphragm flexes due to extension of said piezoelectric element.

27. The piezoelectric optical relay of claim 26 wherein said piezoelectric element is a bending mode piezoelectric element.

28. The piezoelectric optical relay of claim 27 wherein wherein said optical element is coated with a substance so that the index of refraction substantially matches the optical path.

29. The piezoelectric optical relay of claim 28 wherein said substance is from the group comprising metal oxides, semiconductor oxides, metal nitrides, or semiconductor nitrides, or combinations thereof.

30. The piezoelectric optical relay of claim 28 wherein said substance acts as a filter.

31. The piezoelectric optical relay of claim 29 wherein said diaphragm is from the group comprising stainless steel, brass, beryllium copper, spring steel, ceramic, or polymer.