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Method and apparatus for early detection of material accretion and peeling in plasma system

  • US 20030193010A1
  • Filed: 04/15/2002
  • Published: 10/16/2003
  • Est. Priority Date: 04/15/2002
  • Status: Active Grant
First Claim
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1. An apparatus for detecting material accretion and peeling in a system, comprising:

  • a chamber having a chamber interior for containing processing operations and comprising a surface in said chamber interior;

    a process controller operably connected to said chamber for terminating said processing operations in said chamber interior; and

    a plurality of optical sensors provided in said chamber and operably connected to said process controller for monitoring relative brightness between various regions of said surface and activating said process controller when said relative brightness varies by at least about 1%.

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