Display device and method of fabricating the same

• US 20030193054A1
• Filed: 04/14/2003
• Published: 10/16/2003
• Est. Priority Date: 04/15/2002
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Murakami, Satoshi, Hayakawa, Masahiko, Yamazaki, Shunpei, Akimoto, Kengo
• Granted Patent: US 7,411,215 B2
• Time in Patent Office: Days
• US Class Current: 257/72
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 33/44 characterised by the coatings, e.g. passivation layer or anti-reflective coating

Abstract

To achieve promotion of stability of operational function of display device and enlargement of design margin in circuit design, in a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate, the semiconductor element includes a photosensitive organic resin film as an interlayer insulating film, an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by a second insulating nitride film, a second opening portion provided at an inorganic insulating film is provided on an inner side of the first opening portion, the semiconductor and a wiring are connected through the first opening portion and the second opening portion and the pixel electrode is provided at a layer on a lower side of an activation layer.

Claims

1. A display device comprising a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate:

wherein the semiconductor element comprises an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film provided on an upper side of the activation layer, an organic resin film provided over the first insulating nitride film, a second insulating nitride film provided over the organic resin film and a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion provided at the organic resin film is covered by the second insulating nitride film, further comprising;

a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and

wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.

6. The display device according to claim 1, wherein said organic resin film is a photosensitive organic resin film.

11. The display device according to claim 1, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

16. The display device according to claim 1, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

21. The display device according to claim 1, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

26. The display device according to claim 1, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

31. An electronic device having the display device according to claim 1, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

2. A display device comprising a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate:

wherein the semiconductor element comprises an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film provided on an upper side of the activation layer, an organic resin film provided over the first insulating nitride film, a second insulating nitride film provided over the organic resin film and a wiring provided above the second insulating nitride film;

wherein an inner wall face of a first opening portion provided at the organic resin film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating film and the second insulating film are brought into contact with each other over 0.3 through 3 μ

m, further comprising;

a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and

wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.

7. The display device according to claim 2, wherein said organic resin film is a photosensitive organic resin film.

12. The display device according to claim 2, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

17. The display device according to claim 2, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

22. The display device according to claim 2, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

27. The display device according to claim 2, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

32. An electronic device having the display device according to claim 2, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

3. A display device comprising a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate:

wherein the semiconductor element comprises an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film provided on an upper side of the activation layer, an acrylic film provided over the first insulating nitride film, a second insulating nitride film provided above the acrylic film and a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion provided at the acrylic film is covered by the second insulating nitride film, further comprising;

a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and

wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.

8. The display device according to claim 3, wherein said acrylic film is a positive type photosensitive acrylic film.

13. The display device according to claim 3, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

18. The display device according to claim 3, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

23. The display device according to claim 3, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

28. The display device according to claim 3, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

33. An electronic device having the display device according to claim 3, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

4. A display device comprising a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate:

wherein the semiconductor element comprises an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film provided on an upper side of the activation layer, an acrylic film provided over the first insulating nitride film, a second insulating nitride film provided over the acrylic film and a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion provided at the acrylic film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating film and the second insulating film are brought into contact with each other over 0.3 through 3 μ

m, further comprising;

a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and

wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.

9. The display device according to claim 4, wherein said acrylic film is a positive type photosensitive acrylic film.

14. The display device according to claim 4, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

19. The display device according to claim 4, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

24. The display device according to claim 4, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

29. The display device according to claim 4, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

34. An electronic device having the display device according to claim 4, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

5. A display device comprising a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate:

wherein the semiconductor element comprises an activation layer, a gate insulating film in contact with the activation layer, a gate electrode opposed to the activation layer through the gate insulating film, a first insulating nitride film including argon provided on an upper side of the activation layer, a first organic resin film provided over the first insulating nitride film, a second insulating nitride film including argon provided over the organic resin film, a wiring provided over the second insulating nitride film, a second organic resin film provided over the wiring, a third insulating nitride film including argon provided over the second organic resin film and a metal film added with Li provided over the third insulating nitride film;

wherein an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by the second insulating nitride film, further comprising;

a second opening portion provided at a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film on an inner side of the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion; and

wherein the pixel electrode is provided at a layer on a lower side of the activation layer and connected to the semiconductor element through the wiring.

10. The display device according to claim 5, wherein said first and second acrylic film are positive type photosensitive acrylic films.

15. The display device according to claim 5, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

20. The display device according to claim 5, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

25. The display device according to claim 5, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

30. The display device according to claim 5, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

35. An electronic device having the display device according to claim 5, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

36. A method of fabricating a display device comprising a method of fabricating a display device comprising the steps of

forming a pixel electrode covered by a base film on a substrate;

forming a semiconductor film over the base film;

forming a gate insulating film over the semiconductor film;

forming a gate electrode over the gate insulating film;

forming an impurity region at the semiconductor film;

forming a first insulating nitride film over the gate electrode;

forming an organic resin film over the first insulating nitride film;

forming a first opening portion at the organic resin film over the impurity region;

forming a second insulating nitride film to cover the first opening portion;

forming a second opening portion by etching the second insulating nitride film, the first insulating nitride film and the gate insulating film at a bottom face of the first opening portion;

forming a wiring over the second insulating nitride film and connecting the impurity region and the wiring through the first opening portion and the second opening portion;

wherein in forming the first opening portion, the organic resin film is etched over the pixel electrode;

in forming the second opening portion, the pixel electrode is exposed by etching the second insulating nitride film, the first insulating nitride film, the gate insulating film and the base film and thereafter connecting the pixel electrode and the wiring.

38. The display device according to claim 36,

wherein said organic resin film is a photosensitive organic resin film.

40. The method of fabricating a display device according to claim 36, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

42. The method of fabricating a display device according to claim 36, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

44. The method of fabricating a display device according to claim 36, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

46. The method of fabricating a display device according to claim 36, wherein a contact angle θ

at a lower end portion of the first opening portion is set to 30°

<

θ

<

65°

.

37. A method of fabricating a display device comprising a method of fabricating a display device comprising the steps of:

forming a pixel electrode covered by a base film on a substrate;

forming a semiconductor film over the base film;

forming a gate insulating film over the semiconductor film;

forming a gate electrode over the gate insulating film;

forming an impurity region at the semiconductor film;

forming a first insulating nitride film over the gate electrode;

forming an acrylic film over the first insulating nitride film;

forming a first opening portion at the acrylic film over the impurity region;

forming a second insulating nitride film to cover the first opening portion;

forming a second opening portion by etching the second insulating nitride film, the first insulating nitride film and the gate insulating film at a bottom face of the first opening portion,

forming a wiring over the second insulating nitride film and connecting the impurity region and the wiring through the first opening portion and the second opening portion;

wherein in forming the first opening portion, the acrylic film is etched over the pixel electrode,

in forming the second opening portion, the pixel electrode is exposed by etching the second insulating nitride film, the first insulating nitride film, the gate insulating film and the base film and thereafter connecting the pixel electrode and the wiring.

39. The display device according to claim 37,

wherein said acrylic film is a positive type photosensitive acrylic film.

41. The method of fabricating a display device according to claim 37, wherein the first insulating nitride film and the second insulating nitride film each comprises a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film or an aluminum oxynitride film.

43. The method of fabricating a display device according to claim 37, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

45. The method of fabricating a display device according to claim 37, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

47. The method of fabricating a display device according to claim 37, wherein a contact angle θ

at a lower end portion of the first opening portion is set to 30°

<

θ

<

65°

.