MEMS-integrated inertial measurement units on a common substrate
First Claim
1. A planar, integrated inertial measurement unit (IMU) based on a common substrate acting as a gimbal, the IMU including at least two coplanar inertial measurement instruments, the IMU comprising:
- a common planar gimbal; and
a responsive member for each instrument, each responsive member coupled to the gimbal by flexures;
wherein the gimbal is driven in oscillation to provide a common drive motion to all of the instruments.
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Abstract
MEMS-Integrated IMUs are possible based on a common substrate that provides a common oscillatory drive for the operation of the gyroscopes and accelerometers. The common substrate becomes the stable member utilized in conventional IMUs. The advantages of the embodiments are smallest size, flexibility in how IMUs are configured, reduced electronics and a single package. MEMS integration also reduces uncertainties due to separately developed instruments based on different fabrication processes, materials, assembly and alignment.
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Citations
22 Claims
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1. A planar, integrated inertial measurement unit (IMU) based on a common substrate acting as a gimbal, the IMU including at least two coplanar inertial measurement instruments, the IMU comprising:
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a common planar gimbal; and
a responsive member for each instrument, each responsive member coupled to the gimbal by flexures;
wherein the gimbal is driven in oscillation to provide a common drive motion to all of the instruments. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An integrated inertial measurement unit (IMU) comprising:
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a common gimbal; and
a plurality of stacked inertial measurement instruments, each instrument comprising a responsive member coupled by flexures to a case;
wherein the common gimbal is driven in oscillation to provide a common drive motion to all of the instruments.
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Specification