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Increasing the dynamic range of a MEMS gyroscope

  • US 20030196491A1
  • Filed: 04/23/2002
  • Published: 10/23/2003
  • Est. Priority Date: 04/23/2002
  • Status: Active Grant
First Claim
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1. A system for increasing a dynamic range of a MEMS gyroscope, comprising in combination:

  • a MEMS gyroscope including at least one sense plate;

    sense electronics connected to the at least one sense plate, wherein the sense electronics provide an angular rate output; and

    a variable sense bias operable to apply a sense bias voltage to the at least one sense plate.

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