Methods of nanotube films and articles

• US 20030199172A1
• Filed: 04/23/2002
• Published: 10/23/2003
• Est. Priority Date: 07/25/2001
• Status: Active Grant

• Current Assignee: ZEON Corporation
• Original Assignee: Nantero Incorporated
• Inventors: Segal, Brent M., Rueckes, Thomas
• Granted Patent: US 6,835,591 B2
• Time in Patent Office: Days
• US Class Current: 438/754
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/77 Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 29/413 Nanosized electrodes, e.g. nanowire electrodes comprising one or a plurality of nanowires nanosized carbon materials, e.g. carbon nanotubes, per se C01B32/15; transparent electrodes comprising carbon nano-tubes H10K30/821, nanotechnology per se B82B
• CPC Class Codes: H10B 99/10 Memory cells having a cross-point geometry
• CPC Class Codes: H10K 30/821 comprising carbon nanotubes
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: Y10S 977/75 Single-walled
• CPC Class Codes: Y10S 977/778 within specified host or matrix material, e.g. nanocomposite films
• CPC Class Codes: Y10S 977/843 Gas phase catalytic growth, i.e. chemical vapor deposition
• CPC Class Codes: Y10S 977/857 including coating
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching

Abstract

Nanotube films and articles and methods of making the same are disclosed. A conductive article includes an aggregate of nanotube segments in which the nanotube segments contact other nanotube segments to define a plurality of conductive pathways along the article. The nanotube segments may be single walled carbon nanotubes, or multi-walled carbon nanotubes. The various segments may have different lengths and may include segments having a length shorter than the length of the article. The articles so formed may be disposed on substrates, and may form an electrical network of nanotubes within the article itself. Conductive articles may be made on a substrate by forming a nanotube fabric on the substrate, and defining a pattern within the fabric in which the pattern corresponds to the conductive article. The nanotube fabric may be formed by growing the nanotube fabric on the substrate using a catalyst, for example, in which the catalyst is a gas phase catalyst, or in which the catalyst is a metallic gas phase catalyst. The nanotube fabric may be formed by depositing a solution of suspended nanotubes on the substrate. The deposited solution may be spun to create a spin-coating of the solution. The solution may be deposited by dipping the substrate into the solution. The nanotube fabric is formed by spraying an aerosol having nanotubes onto a surface of the substrate.

Claims

1. A method of making conductive articles on a substrate, comprising:

forming a nanotube fabric on the substrate;

defining a pattern within the fabric in which the pattern corresponds to the conductive article;

removing a portion of the fabric so that the patterned fabric remains on the substrate to form conductive articles.

2. The method of claim 1 wherein the nanotube fabric is formed by growing the nanotube fabric on the substrate using a catalyst.

3. The method of claim 2 wherein the catalyst is a gas phase catalyst.

4. The method of claim 3 wherein the catalyst is a metallic gas phase catalyst.

5. The method of claim 1 wherein the nanotube fabric is formed by depositing a solution of suspended nanotubes on the substrate.

6. The method of claim 5 wherein the deposited solution is spun to create a spin-coating of the solution.

7. The method of claim 5 wherein the solution is deposited by dipping the substrate into the solution.

8. The method of claim 1 wherein the nanotube fabric is formed by spraying an aerosol having nanotubes onto a surface of the substrate.

9. A method of making a film of conductive nanotubes comprising providing a substrate, introducing a vapor-phase catalyst to foster growth of nanotubes, and introducing a carbon source to grow a layer of nanotubes that are substantially parallel to a major surface of the substrate.

10. The method of claim 9 wherein the vapor-phase catalyst is a metallocene.

11. The method of claim 9 wherein the nanotubes include single-walled carbon nanotubes.

12. The method of claim 9 wherein the nanotubes include multi-walled carbon nanotubes.

13. A method of making conductive articles, comprising:

providing a substrate;

providing a patterned layer of material;

providing a catalyst that fosters growth of nanotubes

providing a carbon source, so as to grow nanotubes substantially parallel to a major surface of the substrate in regions defined by the pattern.

14. The method of claim 13 wherein the carbon source and the catalyst are introduced in a single act.

15. The method of claim 13 wherein the carbon source and the catalyst are introduced as separate acts.

16. The method of claim 13 wherein the patterned layer of material is an insulator or a semiconductor and wherein the nanotubes grow over the patterned material.

17. The method of claim 13 wherein the patterned layer is a patterned metal layer and wherein the nanotubes grow in areas other than the patterned metal layer.