Passive temperature compensation technique for MEMS devices
First Claim
1. A system for providing a passive temperature compensation technique to a microelectromechanical system (MEMS) sensor comprising a circuit coupled to the MEMS sensor including at least one diode having a voltage drop, wherein a compensated sense output is formed by combining an uncompensated sense output with a diode output associated with the voltage drop.
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Accused Products
Abstract
In an exemplary embodiment, a MEMS sensor using a passive temperature compensation technique may provide an uncompensated sense output. Additionally, a circuit coupled to the MEMS sensor may include a diode having a voltage drop. A compensated sense output may be formed by combining the uncompensated sense output with a diode output that is proportional to the voltage drop across the diode.
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Citations
21 Claims
- 1. A system for providing a passive temperature compensation technique to a microelectromechanical system (MEMS) sensor comprising a circuit coupled to the MEMS sensor including at least one diode having a voltage drop, wherein a compensated sense output is formed by combining an uncompensated sense output with a diode output associated with the voltage drop.
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12. A system for providing a passive temperature compensation technique to a MEMS sensor comprising in combination:
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the MEMS sensor providing a sense signal;
a sense processing unit operable to convert the sense signal into an uncompensated sense output;
at least one diode having a voltage drop;
at least one operational amplifier operable to amplify the voltage drop to form a diode output; and
a summing junction operable to combine the diode output with the uncompensated sense output to form a compensated sense output. - View Dependent Claims (13, 14, 15, 16)
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17. A method using a passive temperature compensation technique to measure a rate of rotation of a MEMS gyroscope comprising in combination:
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driving a proof mass of the MEMS gyroscope at a drive velocity;
rotating the MEMS gyroscope;
generating a sense signal based on a change in capacitance between the proof mass and a sense plate;
converting the sense signal into an uncompensated sense output;
combining the uncompensated sense output with a diode output to form a compensated sense output;
utilizing the compensated sense output for calculating a Coriolis acceleration; and
calculating the rate of rotation of the MEMS gyroscope from the Coriolis acceleration and drive velocity. - View Dependent Claims (18, 19, 20, 21)
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Specification