MEMS gyroscope with parametric gain
First Claim
1. A microelectromechanical gyroscope comprising:
- a proof mass;
a motor driver that oscillates the proof mass at its resonant frequency in a motor mode of oscillation;
a sense electrode positioned proximate the proof mass to detect oscillation of the proof mass in a sense mode of oscillation; and
a pump coupled to the sense electrode that provides a force at twice the resonant frequency of the motor mode of oscillation.
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Abstract
A microelectromechanical (MEMS) gyroscope has one or more proof masses mechanically coupled to a substrate by springs. A motor force drives the proof masses at their resonant frequency in one direction, 180 degrees out of phase with each other in the case of a dual proof mass gyroscope. Sense electrodes sense motion of the proof masses in response to a Coriolis force. The motion caused by the Coriolis force is perpendicular to the motion caused by the motor force. An AC pump voltage at twice the motor frequency is applied to the sense electrodes to provide parametric amplification of the Coriolis force. The AC pump voltage alters the mechanical and electrical gain of the gyroscope.
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Citations
23 Claims
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1. A microelectromechanical gyroscope comprising:
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a proof mass;
a motor driver that oscillates the proof mass at its resonant frequency in a motor mode of oscillation;
a sense electrode positioned proximate the proof mass to detect oscillation of the proof mass in a sense mode of oscillation; and
a pump coupled to the sense electrode that provides a force at twice the resonant frequency of the motor mode of oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of measuring Coriolis force, the method comprising:
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oscillating a proof mass at its resonant frequency in a motor mode of oscillation;
providing a pumping force to a sense mode of oscillation of the proof mass at approximately twice the resonant frequency and substantially perpendicular to the motor mode of oscillation; and
detecting oscillation of the proof mass caused by the Coriolis force in the sense mode of oscillation. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A microelectromechanical gyroscope comprising:
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a pair of proof masses suspended from a substrate by springs;
a motor driver that oscillates the proof masses at their resonant frequency in a motor mode of oscillation;
two pair of sense electrodes, each pair sandwiching a proof mass, which operates as a further sense electrode to form sense capacitors for each proof mass to detect oscillation of the proof masses in a sense mode of oscillation; and
a pump coupled to the sense electrodes that provides a force at approximately twice the resonant frequency of the motor mode of oscillation. - View Dependent Claims (19, 20, 21)
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22. A method of measuring Coriolis force, the method comprising:
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oscillating a proof mass suspended by a spring at its resonant frequency in a motor mode of oscillation;
providing a pumping force to a sense mode of oscillation of the proof mass at approximately twice the resonant frequency and substantially perpendicular to the motor mode of oscillation; and
detecting oscillation of the proof mass caused by the Coriolis force in the sense mode of oscillation.
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23. A method of measuring Coriolis force, the method comprising:
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oscillating a pair of proof masses suspended by springs at their resonant frequency in a motor mode of oscillation;
providing a pumping force to a sense mode of oscillation of the proof masses at approximately twice the resonant frequency and substantially perpendicular to the motor mode of oscillation; and
detecting oscillation of the proof masses caused by the Coriolis force in the sense mode of oscillation.
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Specification