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MEMS gyroscope with parametric gain

  • US 20030200804A1
  • Filed: 04/25/2002
  • Published: 10/30/2003
  • Est. Priority Date: 04/25/2002
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope comprising:

  • a proof mass;

    a motor driver that oscillates the proof mass at its resonant frequency in a motor mode of oscillation;

    a sense electrode positioned proximate the proof mass to detect oscillation of the proof mass in a sense mode of oscillation; and

    a pump coupled to the sense electrode that provides a force at twice the resonant frequency of the motor mode of oscillation.

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