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Flexural plate wave sensor and array

  • US 20030200823A1
  • Filed: 12/19/2002
  • Published: 10/30/2003
  • Est. Priority Date: 03/20/2000
  • Status: Active Grant
First Claim
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1. A method for manufacturing a flexural plate wave sensor comprising the steps of:

  • depositing an etch-stop layer over a substrate;

    depositing a membrane layer over said etch stop layer;

    depositing a piezoelectric layer over said membrane layer;

    forming a first transducer on said piezoelectric layer;

    forming a second transducer on said piezoelectric layer, spaced from said first transducer;

    etching a cavity through the substrate, the cavity having substantially parallel interior walls;

    removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer; and

    depositing an absorptive coating on the exposed portion of the membrane layer.

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