Optical monitoring and control system and method for plasma reactors
First Claim
1. A method for monitoring plasma processing of a substrate with a surface in a plasma reactor having an electrode, the method comprising the steps of:
- a) positioning the substrate in the plasma reactor;
b) creating a plasma in the plasma reactor;
c) monitoring optical emissions emanating from a plurality of different regions of the plasma, which regions are spaced apart in a direction parallel to the surface of the substrate during plasma processing of the substrate;
d) determining an integrated power spectrum for each of said different plasma regions and comparing each of said integrated power spectra to a predetermined value.
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Accused Products
Abstract
A method of adjusting plasma processing of a substrate in a plasma reactor having an electrode assembly. The method includes the steps of positioning the substrate in the plasma reactor, creating a plasma in the plasma reactor, monitoring optical emissions emanating from a plurality of different regions of the plasma in a direction substantially parallel to the surface of the substrate during plasma processing of the substrate, and determining an integrated power spectrum for each of the different plasma regions and comparing each of the integrated power spectra to a predetermined value. One aspect of the method includes utilizing an electrode assembly having a plurality of electrode segments and adjusting RF power delivered to the one or more electrode segments based on differences in the integrated power spectra from the predetermined value. Another aspect of the invention includes altering the flow of gas to different regions of the plasma in response to differences in the integrated power spectra detected by the fiber optic sensors. Several types of novel electrode assemblies suitable for carrying out the method of the invention are also disclosed.
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Citations
23 Claims
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1. A method for monitoring plasma processing of a substrate with a surface in a plasma reactor having an electrode, the method comprising the steps of:
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a) positioning the substrate in the plasma reactor;
b) creating a plasma in the plasma reactor;
c) monitoring optical emissions emanating from a plurality of different regions of the plasma, which regions are spaced apart in a direction parallel to the surface of the substrate during plasma processing of the substrate;
d) determining an integrated power spectrum for each of said different plasma regions and comparing each of said integrated power spectra to a predetermined value. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A plasma processing system for controlling the processing of a substrate with a plasma, the system comprising:
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a) a plasma reactor chamber capable of containing the plasma;
b) a substrate pedestal for supporting the substrate;
c) a segmented electrode assembly arranged within said chamber adjacent said substrate, said assembly having a plurality of electrode segments;
d) a plurality of RF power supplies, each said supply electrically connected to a corresponding one of said electrode segments;
e) a plurality of fiber optic sensors integrated into said electrode assembly, each of said sensors having first and second ends, said second ends arranged to receive light from respective regions of the plasma and transmit said light to said first ends;
f) a sensor array system arranged to receive light from said first ends of said fiber optic sensors and to convert said light into an electronic output signal corresponding to the spectral content of said light as a function of position across the plasma; and
g) a control system in electrical communication with said sensor array system and said plurality of RF power supplies, for controlling the RF power to said electrode segments based on said electronic output signal from said sensor array system. - View Dependent Claims (8)
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9. An electrode assembly for a plasma reactor system for processing a substrate with a plasma, the electrode comprising:
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a) a plurality of substantially planar electrode segments arranged adjacent one another and arranged to be substantially parallel to the substrate when said segments are installed in the reactor system;
b) insulating members, arranged between said electrode segments, each having a sensor bore formed therein; and
c) a plurality of fiber optic sensors each having first and second ends, with said second ends held within respective sensor bores such that said second ends receive light from respective regions of the plasma. - View Dependent Claims (10, 20)
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11. An electrode assembly for a plasma reactor system for processing a substrate with a plasma, comprising:
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a) a planar electrode body having upper and lower substantially planar surfaces with a plurality of through-bores connecting said upper and lower surfaces, through which gas can flow; and
b) two or more fiber optic support members respectively arranged in corresponding two or more of said bores, each of said members capable of holding a fiber optical sensor within said bore such that the fiber optical sensor receives light from the plasma. - View Dependent Claims (12, 13)
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14. An electrode assembly for a plasma reactor system for processing a substrate with a plasma, comprising:
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a) a planar electrode body having upper and lower substantially planar surfaces with a plurality of through-bores having an input end at said upper surface and an exit end at said lower surface;
b) two or more transparent windows, each arranged at a respective exit end of a respective one of said bores; and
c) two or more fiber optic sensors each having a first end and a second end, with each of said second ends arranged within a corresponding one of said two or more bores adjacent one of said windows. - View Dependent Claims (15, 16)
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17. An electrode assembly for a plasma reactor system for processing a substrate with a plasma, comprising:
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a) an electrode body having a lower surface;
b) a plurality of adjustable nozzle units arranged along said electrode body lower surface, for controlling the flow of gas through the electrode assembly, each said nozzle unit having a nozzle plug with a tip, and a nozzle bore passing through said nozzle plug and said tip; and
c) a plurality of fiber optic sensors, each held in one of said nozzle bores such that said fiber optic sensors can receive light from the plasma through said tip. - View Dependent Claims (18, 19, 21)
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22. A method for improving overall plasma processing uniformity of a wafer in a plasma processing system having a plasma and an electrode assembly with a plurality of electrode segments connected to respective RF power supplies, comprising the steps of:
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a) determining a time to an endpoint for each of a plurality of portions of a first wafer using an array of sensors arranged adjacent the plasma and spaced apart in a direction substantially parallel to the wafer;
b) loading a second wafer to be processed into the plasma processing system; and
c) adjusting RF power delivered to each electrode segment by an amount proportional to differences in said endpoint times. - View Dependent Claims (23)
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Specification