In-situ cleaning processes for semiconductor electroplating electrodes
First Claim
1. A method for in-situ cleaning a semiconductor electroplating electrode to remove at least one plating metal from the surface of the electrode, said electrode being used to conduct current between a semiconductor workpiece and an electroplating electrical power supply, comprising:
- placing the electrode into a plating liquid;
passing a reverse current between the electrode and said plating liquid using reverse polarity which causes metal previously plated onto the electrode to electrochemically disperse into the plating liquid.
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Accused Products
Abstract
Methods and apparatuses for in-situ cleaning of semiconductor electroplating electrodes to remove plating metal without requiring the manual removal of the electrodes from the semiconductor plating equipment. The electrode is placed into the plating liquid and an electrical current having reverse polarity is passed between the electrode and plating liquid. Plating deposits which have accumulated on the electrode are electrochemically dissolved and removed from the electrode.
30 Citations
48 Claims
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1. A method for in-situ cleaning a semiconductor electroplating electrode to remove at least one plating metal from the surface of the electrode, said electrode being used to conduct current between a semiconductor workpiece and an electroplating electrical power supply, comprising:
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placing the electrode into a plating liquid;
passing a reverse current between the electrode and said plating liquid using reverse polarity which causes metal previously plated onto the electrode to electrochemically disperse into the plating liquid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for in-situ cleaning a semiconductor electroplating electrode to remove at least one plating metal from the surface of the electrode, said electrode being used to conduct current between a semiconductor workpiece and an electroplating electrical power supply to facilitate plating of the at least one plating metal onto the semiconductor workpiece, said electroplating electrical power supply applying electrical current to said electrode using a first polarity, comprising:
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removing any semiconductor workpiece from a semiconductor workpiece support which includes the electrode as part thereof;
placing the electrode into a plating liquid;
passing a reverse electrical current between the electrode and said plating liquid using a second polarity which has a reverse polarity to said first polarity, said passing current causing the metal plated onto the electrode to be dissolved into the plating liquid. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method for operating a semiconductor electroplating apparatus, comprising:
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placing a semiconductor workpiece in a workpiece support, said workpiece support including at least one electrode which contacts the semiconductor workpiece to conduct electrical current therebetween;
placing at least one surface of the semiconductor workpiece into a plating liquid;
electroplating at least one plating metal onto said at least one surface of the semiconductor workpiece during a normal operating cycle, said electroplating including charging a plating liquid and the semiconductor workpiece to differing voltages which have a first polarity relationship;
removing any semiconductor workpiece from the semiconductor workpiece support;
placing the at least one electrode into the plating liquid;
passing a reverse electrical current between the electrode and said plating liquid using a second polarity which has a reverse polarity to said first polarity, said passing current causing metal plated onto the at least one electrode to electrochemically disperse into the plating liquid. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A semiconductor processing station for use in electroplating a metal onto a semiconductor workpiece, comprising:
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a workpiece support mounted to support a semiconductor workpiece, said workpiece support being capable of holding at least one processed surface of the workpiece in position for contact with a plating liquid;
a plating liquid receptacle in which plating liquid is held;
at least one electrode which is electrically conductive and capable of contacting a semiconductor workpiece held in the workpiece support to conduct electrical current between the at least one electrode and the semiconductor workpiece;
an electroplating power supply for generating a plating current used during a normal operating cycle to electrochemically plate metal onto at least one surface of the semiconductor workpiece using a first voltage difference between the plating liquid and said at least one electrode, said first voltage difference having a first polarity;
a reverse polarity electrical power supply connected to apply electrical current to the at least one electrode and said plating liquid during a cleaning cycle so as to produce a second voltage difference therebetween which is of a second polarity, said second polarity having a reverse polarity relationship compared to said first polarity. - View Dependent Claims (45, 46)
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47. A semiconductor processing station for use in electroplating a metal onto a semiconductor workpiece, comprising:
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a workpiece support mounted to support a semiconductor workpiece, said workpiece support being capable of holding at least one processed surface of the workpiece in position for contact with a plating liquid;
at least one electrode which is electrically conductive and capable of contacting a semiconductor workpiece held in the workpiece support to conduct electrical current between the at least one electrode and the semiconductor workpiece;
an electroplating power supply for generating a plating current used during a normal operating cycle to electrochemically plate metal onto at least one surface of the semiconductor workpiece using a first voltage difference between the plating liquid and said at least one electrode, said first voltage difference having a first polarity;
means for applying electrical current to the at least one electrode and said plating liquid having a second voltage difference which is of a second polarity, said second polarity having a reverse polarity relationship compared to said first polarity. - View Dependent Claims (48)
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Specification