Stage assembly including a reaction assembly that is connected by actuators
First Claim
1. A stage assembly that moves a device, the stage assembly comprising:
- a device table that retains the device;
a stage base that supports the device table;
a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces in at least two degrees of freedom; and
a reaction assembly including (i) a reaction mass assembly coupled to the mover assembly, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom, and (ii) a reaction mover assembly that moves the reaction mass assembly relative to the stage base, the reaction mover assembly including a trim mover having a first component that is secured to the reaction mass assembly and a second component, the first component moving relative to the second component with at least two degrees of freedom.
0 Assignments
0 Petitions
Accused Products
Abstract
A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).
-
Citations
45 Claims
-
1. A stage assembly that moves a device, the stage assembly comprising:
-
a device table that retains the device;
a stage base that supports the device table;
a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces in at least two degrees of freedom; and
a reaction assembly including (i) a reaction mass assembly coupled to the mover assembly, the reaction mass assembly reducing the reaction forces in at least two degrees of freedom, and (ii) a reaction mover assembly that moves the reaction mass assembly relative to the stage base, the reaction mover assembly including a trim mover having a first component that is secured to the reaction mass assembly and a second component, the first component moving relative to the second component with at least two degrees of freedom. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
-
26. A stage assembly that moves a device, the stage assembly comprising:
-
a device table that retains the device;
a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces;
a first reaction mass that is coupled to the mover assembly, the first reaction mass reducing the reaction forces; and
a reaction mover assembly secured to the first reaction mass, the reaction mover assembly including a trim mover having a planar motor that moves the first reaction mass with at least two degrees of freedom. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
-
-
35. A method for making a stage assembly that moves a device, the method comprising the steps of:
-
providing a device table that retains the device;
connecting a mover assembly to the device table, the mover assembly moving the device table with at least two degrees of freedom and generating reaction forces in at least two degrees of freedom; and
coupling a first reaction mass and a second reaction mass to the mover assembly, each of the reaction masses moves with at least two degrees of freedom to reduce the reaction forces in at least two degrees of freedom, wherein the first reaction mass moves with at least two degrees of freedom relative to the second reaction mass. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
-
Specification