Micro-mirror device

• US 20030202264A1
• Filed: 04/30/2002
• Published: 10/30/2003
• Est. Priority Date: 04/30/2002
• Status: Abandoned Application

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Rosi, Leonard A., H. Donaldson, Jeremy, Schulte, Donald W., McMahon, Terry E., Radominski, George, Bengali, Sadiq S., Weber, Timothy L., Johnson, Norman L.
• Application Number:
  US10/136,719
• Publication Number:
  US 20030202264A1
• Time in Patent Office: Days
• US Class Current: 359/877
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 7/04 Networks or arrays of similar microstructural devices
• CPC Class Codes: G02B 26/004 based on a displacement or a deformation of a fluid
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micro-mirror device includes a substrate having a surface and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectric liquid is disposed in the cavity and a reflective element is interposed between the surface of the substrate and the plate. As such, the reflective element is adapted to move between a first position and at least one second position.

Claims

1. A micro-mirror device, comprising:

a substrate having a surface;

a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;

a dielectric liquid disposed in the cavity; and

a reflective element interposed between the surface of the substrate and the plate,

wherein the reflective element is adapted to move between a first position and at least one second position.

2. The device of claim 1, wherein the plate and the dielectric liquid are transparent.

3. The device of claim 1, wherein the reflective element is submerged in the dielectric liquid.

4. The device of claim 1, wherein the reflective element is positioned above the dielectric liquid.

5. The device of claim 1, wherein the at least one second position of the reflective element is oriented at an angle to the first position.

6. The device of claim 1, wherein the at least one second position of the reflective element is oriented substantially parallel to the first position.

7. The device of claim 1, wherein the first position of the reflective element is a neutral position of the micro-mirror device and the at least one second position of the reflective element is an actuated position of the micro-mirror device.

8. The device of claim 1, further comprising:

at least one post extending from the surface of the substrate and supporting the reflective element relative to the surface of the substrate.

9. The device of claim 8, further comprising:

at least one hinge supporting the reflective element from the at least one post, wherein the at least one hinge is adapted to facilitate movement of the reflective element between the first position and the at least one second position.

10. The device of claim 9, wherein the at least one hinge includes a torsional member adapted to twist about a longitudinal axis thereof.

11. The device of claim 9, wherein the at least one hinge includes a flexure member adapted to bend along a longitudinal axis thereof.

12. The device of claim 8, further comprising:

a conductive via extending through the at least one post and electrically coupled to the reflective element.

13. The device of claim 8, wherein the reflective element includes a substantially rectangular-shaped portion having four contiguous side portions, wherein the at least one post is positioned within the four contiguous side portions.

14. The device of claim 8, wherein the reflective element includes a substantially H-shaped portion having a pair of spaced leg portions and a connecting portion extending between the spaced leg portions, wherein the at least one post includes a pair of posts each positioned on opposite sides of the connecting portion between the spaced leg portions.

15. The device of claim 8, wherein the reflective element includes a substantially rectangular-shaped central portion and a plurality of substantially rectangular-shaped portions positioned at corners of the central portion, wherein the at least one post includes a plurality of posts each positioned at corners of the central portion.

16. The device of claim 8, wherein the reflective element includes a substantially rectangular-shaped portion, wherein the at least one post is positioned to a side of the rectangular-shaped portion.

17. The device of claim 1, further comprising:

a driver plate interposed between the surface of the substrate and the reflective element, wherein the driver plate and the reflective element are adapted to move between the first position and the at least one second position.

18. The device of claim 1, wherein the reflective element includes a conductive material.

19. The device of claim 18, wherein the reflective element includes a reflective material disposed on the conductive material.

20. The device of claim 18, wherein the reflective element is adapted to move in response to application of an electrical signal to the conductive material.

21. The device of claim 1, further comprising:

at least one electrode formed on the surface of the substrate adjacent an end of the reflective element,

wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode.

22. The device of claim 21, wherein the reflective element includes a conductive material, wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode and the conductive material.

23. The device of claim 21, wherein the at least one electrode includes a first electrode formed on the surface of the substrate adjacent a first end of the reflective element and a second electrode formed on the surface of the substrate adjacent a second end of the reflective element opposite the first end thereof,

wherein the reflective element is adapted to move in a first direction in response to application of an electrical signal to the first electrode and move in a second direction opposite the first direction in response to application of an electrical signal to the second electrode.

24. The device of claim 1, wherein drive circuitry for the micro-mirror device is formed in the substrate.

25. The device of claim 1, wherein the dielectric liquid is adapted to increase an actuation force on the reflective element as generated by a given activation energy.

26. The device of claim 1, wherein the dielectric liquid is adapted to transfer heat within the micro-mirror device.

27. The device of claim 1, wherein the reflective element includes a plurality of reflective elements arranged in an array.

28. The device of claim 27, wherein adjacent reflective elements are oriented substantially perpendicular to each other.

29. A display device including the micro-mirror device of claim 1.

30. A method of forming a micro-mirror device, the method comprising:

providing a substrate having a surface;

orienting a plate substantially parallel to the surface of the substrate and spacing the plate from the surface of the substrate, including defining a cavity between the plate and the surface of the substrate;

disposing a dielectric liquid in the cavity; and

interposing a reflective element between the surface of the substrate and the plate,

wherein the reflective element is adapted to move between a first position and at least one second position.

31. The method of claim 30, wherein the plate and the dielectric liquid are transparent.

32. The method of claim 30, wherein interposing the reflective element between the surface of the substrate and the plate includes submerging the reflective element in the dielectric liquid.

33. The method of claim 30, wherein interposing the reflective element between the surface of the substrate and the plate includes positioning the reflective element above the dielectric liquid.

34. The method of claim 30, wherein the at least one second position of the reflective element is oriented at an angle to the first position.

35. The method of claim 30, wherein the at least one second position of the reflective element is oriented substantially parallel to the first position.

36. The method of claim 30, further comprising:

extending at least one post from the surface of the substrate,

wherein interposing the reflective element between the surface of the substrate and the transparent plate includes supporting the reflective element relative to the surface of the substrate from the at least one post.

37. The method of claim 36, further comprising:

extending at least one hinge between the at least one post and the reflective element, wherein the at least one hinge is adapted to facilitate movement of the reflective element between the first position and the at least one second position.

38. The method of claim 37, wherein the at least one hinge includes a torsional member adapted to twist about a longitudinal axis thereof.

39. The method of claim 37, wherein the at least one hinge includes a flexure member adapted to bend along a longitudinal axis thereof.

40. The method of claim 36, further comprising:

extending a conductive via through the at least one post and electrically coupling the conductive via with the reflective element.

41. The method of claim 36, wherein the reflective element includes a substantially rectangular-shaped portion having four contiguous side portions,

wherein supporting the reflective element with the at least one post includes positioning the at least one post within the four contiguous side portions.

42. The method of claim 36, wherein the reflective element includes a substantially H-shaped portion having a pair of spaced leg portions and a connecting portion extending between the spaced leg portions,

wherein supporting the reflective element with the at least one post includes supporting the reflective element with a pair of posts and positioning each of the posts on opposite sides of the connecting portion between the spaced leg portions.

43. The method of claim 36, wherein the reflective element includes a substantially rectangular-shaped central portion and a plurality of substantially rectangular-shaped portions positioned at corners of the central portion,

wherein supporting the reflective element with the at least one post includes supporting the reflective element with a plurality of posts and positioning each of the posts at corners of the central portion.

44. The method of claim 36, wherein the reflective element includes a substantially rectangular-shaped portion,

wherein supporting the reflective element with the at least one post includes positioning the at least one post to a side of the rectangular-shaped portion.

45. The method of claim 36, further comprising:

interposing a driver plate between the surface of the substrate and the reflective element, wherein the driver plate and the reflective element are adapted to move between the first position and the at least one second position.

46. The method of claim 30, wherein the reflective element includes a conductive material.

47. The method of claim 46, wherein the reflective element includes a reflective material disposed on the conductive material.

48. The method of claim 46, wherein the reflective element is adapted to move in response to application of an electrical signal to the conductive material.

49. The method of claim 30, further comprising:

forming at least one electrode on the surface of the substrate adjacent an end of the reflective element,

wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode.

50. The method of claim 49, wherein the reflective element includes a conductive material, wherein the reflective element is adapted to move in response to application of an electrical signal to the at least one electrode and the conductive material.

51. The method of claim 49, wherein forming the at least one electrode on the surface of the substrate includes forming a first electrode on the surface of the substrate adjacent a first end of the reflective element and forming a second electrode on the surface of the substrate adjacent a second end of the reflective element opposite the first end thereof,

wherein the reflective element is adapted to move in a first direction in response to application of an electrical signal to the first electrode and move in a second direction opposite the first direction in response to application of an electrical signal to the second electrode.

52. The method of claim 30, wherein drive circuitry for the micro-mirror device is formed in the substrate.

53. The method of claim 30, wherein the dielectric liquid is adapted to increase an actuation force on the reflective element as generated by a given activation energy.

54. The method of claim 30, wherein the dielectric liquid is adapted to transfer heat within the micro-mirror device.

55. The method of claim 30, wherein interposing the reflective element between the surface of the substrate and the plate includes interposing a plurality of reflective elements between the surface of the substrate and the plate and arranging the reflective elements in an array.

56. The method of claim 55, wherein arranging the reflective elements in an array includes orienting adjacent reflective elements substantially perpendicular to each other.

57. A micro-actuator, comprising:

a substrate having a surface;

a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;

a dielectric liquid disposed in the cavity; and

an actuating element interposed between the surface of the substrate and the plate,

wherein the actuating element is adapted to move between a first position and at least one second position.

58. The micro-actuator of claim 57, wherein the plate and the dielectric liquid are transparent, and wherein the actuating element has a reflective surface on a side adjacent the plate.

59. The micro-actuator of claim 57, wherein the actuating element is submerged in the dielectric liquid.

60. The micro-actuator of claim 57, wherein the actuating element is positioned above the dielectric liquid.

61. The micro-actuator of claim 57, wherein the at least one second position of the actuating element is oriented at an angle to the first position.

62. The micro-actuator of claim 57, wherein the at least one second position of the actuating element is oriented substantially parallel to the first position.

63. The micro-actuator of claim 57, further comprising:

at least one support supporting the actuating element relative to the substrate.

64. The micro-actuator of claim 63, further comprising:

at least one torsional member supporting the actuating element from the at least one support, wherein the at least one torsional member is adapted to twist about a longitudinal axis thereof and facilitate movement of the actuating element between the first position and the at least one second position.

65. The micro-actuator of claim 63, further comprising:

at least one flexure member supporting the actuating element from the at least one support, wherein the at least one flexure member is adapted to bend along a longitudinal axis thereof and facilitate movement of the actuating element between the first position and the at least one second position.

66. The micro-actuator of claim 63, further comprising:

a conductive via extending through the at least one support and electrically coupled to the actuating element.

67. The micro-actuator of claim 57, further comprising:

a driver plate interposed between the surface of the substrate and the actuating element, wherein the driver plate and the actuating element are adapted to move between the first position and the at least one second position.

68. The micro-actuator of claim 57, wherein the actuating element includes a conductive material.

69. The micro-actuator of claim 68, wherein the actuating element is adapted to move in response to application of an electrical signal to the conductive material.

70. The micro-actuator of claim 57, further comprising:

at least one electrode formed on the surface of the substrate adjacent an end of the actuating element,

wherein the actuating element is adapted to move in response to application of an electrical signal to the at least one electrode.

71. The micro-actuator of claim 70, wherein the actuating element includes a conductive material, wherein the actuating element is adapted to move in response to application of an electrical signal to the at least one electrode and the conductive material.

72. The micro-actuator of claim 57, wherein drive circuitry for the micro-actuator is formed in the substrate.

73. The micro-actuator of claim 57, wherein the dielectric liquid is adapted to increase an actuation force on the actuating element as generated by a given activation energy.

74. The micro-actuator of claim 57, wherein the dielectric liquid is adapted to transfer heat within the micro-actuator.

75. A micro-actuator, comprising:

a substrate having a surface;

a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;

an actuating element interposed between the surface of the substrate and the plate; and

means for moving the actuating element between a first position and at least one second position.

76. The micro-actuator of claim 75, wherein means for moving the actuating element includes means for moving the actuating element through an angle between the first position and the at least one second position.

77. The micro-actuator of claim 75, wherein means for moving the actuating element includes means for moving the actuating element in a direction substantially perpendicular to the surface of the substrate between the first position and the at least one second position.

78. The micro-actuator of claim 75, wherein means for moving the actuating element includes a dielectric liquid disposed in the cavity.

79. The micro-actuator of claim 75, further comprising:

means for transferring heat within the micro-actuator.

80. The micro-actuator of claim 79, wherein means for transferring heat includes a dielectric liquid disposed in the cavity.

81. The micro-actuator of claim 75, further comprising:

means for increasing actuation force on the actuating element as generated by a given activation energy.

82. The micro-actuator of claim 81, wherein means for increasing actuation force includes a dielectric liquid disposed in the cavity.

83. The micro-actuator of claim 75, wherein the actuating element includes a plurality of actuating elements arranged in an array, and further comprising:

means for avoiding cross-talk between adjacent actuating elements.