Micro-mirror device including dielectrophoretic liquid
First Claim
Patent Images
1. A micro-mirror device, comprising:
- a substrate having a surface;
a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
a dielectrophoretic liquid disposed in the cavity, the dielectrophoretic liquid being capable of movement when an electrical signal is applied to the device; and
a reflective element interposed between the surface of the substrate and the plate, wherein the reflective element is adapted to move between a first position and at least one second position.
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Abstract
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic liquid capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position.
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Citations
41 Claims
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1. A micro-mirror device, comprising:
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a substrate having a surface;
a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
a dielectrophoretic liquid disposed in the cavity, the dielectrophoretic liquid being capable of movement when an electrical signal is applied to the device; and
a reflective element interposed between the surface of the substrate and the plate, wherein the reflective element is adapted to move between a first position and at least one second position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A micro-mirror device, comprising:
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a substrate having a surface;
a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
a liquid disposed in the cavity, the liquid being capable of movement without exhibiting outgassing when an electrical signal is applied to the device; and
a reflective element interposed between the surface of the substrate and the plate, wherein the reflective element is adapted to move between a first position and at least one second position. - View Dependent Claims (17, 18)
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19. A micro-actuator, comprising:
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a substrate having a surface;
a plate spaced from and oriented substantially parallel to the surface of the substrate, the plate and the surface of the substrate defining a cavity therebetween;
a dielectrophoretic liquid disposed in the cavity and capable of movement when an electrical signal is applied to the micro-actuator; and
an actuating element interposed between the surface of the substrate and the plate, wherein the actuating element is adapted to move between a first position and at least one second position. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of using a dielectrophoretic liquid in a micro-actuator including an actuator element adapted to move between a first position and at least one second position, the method comprising:
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disposing the dielectrophoretic liquid in a cavity of the micro-actuator, including at least one of positioning the actuator element above and submerging the actuator element in the dielectrophoretic liquid; and
moving the actuator element between the first position and the least one second position, including applying an electrical signal to the micro-actuator, wherein the dielectrophoretic liquid exhibits movement when the electrical signal is applied to the micro-actuator and the movement contributes to the moving of the actuator element between the first position and the at least one second position. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification