Nanoparticle production and corresponding structures

• US 20030203205A1
• Filed: 07/15/2002
• Published: 10/30/2003
• Est. Priority Date: 07/21/1997
• Status: Active Grant

• Current Assignee: Craig R. Horne, James T. Gardner, Nobuyuki Kambe, Pierre J. Demascarel, Robert B. Lynch, Ronald J. Mosso, Shivkumar Chiruvolu, Sujeet Kumar, William E. Mcgovern, Xiangxin Bi
• Original Assignee: Nanogram Corporation (Teijin Limited)
• Inventors: Kambe, Nobuyuki, Chiruvolu, Shivkumar, Kumar, Sujeet, Horne, Craig R., Bi, Xiangxin, Mosso, Ronald J., DeMascarel, Pierre J., Gardner, James T., Lynch, Robert B., McGovern, William E.
• Granted Patent: US 7,384,680 B2
• Time in Patent Office: Days
• US Class Current: 428/402
• CPC Class Codes: B01J 2/006 Coating of the granules without description of the process or the device by which the granules are obtained to prevent the granules sticking together B01J2/30
• CPC Class Codes: B22F 1/052 characterised by a mixture of particles of different sizes or by the particle size distribution
• CPC Class Codes: B22F 1/054 Nanosized particles
• CPC Class Codes: B22F 1/0545 Dispersions or suspensions of nanosized particles
• CPC Class Codes: B22F 1/056 Submicron particles having a size above 100 nm up to 300 nm
• CPC Class Codes: B22F 2202/11 Use of irradiation
• CPC Class Codes: B22F 2998/00 Supplementary information concerning processes or compositions relating to powder metallurgy
• CPC Class Codes: B22F 2999/00 Aspects linked to processes or compositions used in powder metallurgy
• CPC Class Codes: B22F 9/16 using chemical processes
• CPC Class Codes: B22F 9/30 with decomposition of metal compounds, e.g. by pyrolysis
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C23C 24/04 Impact or kinetic deposition of particles
• CPC Class Codes: C23C 24/10 with intermediate formation of a liquid phase in the layer
• CPC Class Codes: C23C 4/123 Spraying molten metal
• CPC Class Codes: Y10T 428/24372 Particulate matter
• CPC Class Codes: Y10T 428/24413 Metal or metal compound
• CPC Class Codes: Y10T 428/24421 Silicon containing
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/25 Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
• CPC Class Codes: Y10T 428/256 Heavy metal or aluminum or compound thereof
• CPC Class Codes: Y10T 428/259 : Silicic material
• CPC Class Codes: Y10T 428/2982 : Particulate matter [e.g., sphere, flake, etc.]

Abstract

Methods are described that have the capability of producing submicron/nanoscale particles, in some embodiments dispersible, at high production rates. In some embodiments, the methods result in the production of particles with an average diameter less than about 75 nanometers that are produced at a rate of at least about 35 grams per hour. In other embodiments, the particles are highly uniform. These methods can be used to form particle collections and/or powder coatings. Powder coatings and corresponding methods are described based on the deposition of highly uniform submicron/nanoscale particles.

Claims

45-1. A collection of particles formed by the method of claim 1.

49. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 500 nm, the particles having effectively no particles with a diameter greater than about 4 times the average particle size, the method comprising reacting at least one precursor compound to produce the product particles at a rate of at least about 35 grams per hour.

50. The method of claim 49 wherein effectively no particles have a diameter greater than about 3 times the average diameter.

51. The method of claim 49 wherein the product particles have a distribution of particle sizes in which at least about 95 percent of the particles have a diameter greater than about 60 percent of the average diameter and less than about 140 percent of the average diameter.

52. The method of claim 49 wherein the product particles have a distribution of particle sizes in which at least about 99 percent of the particles have a diameter greater than about 60 percent of the average diameter and less than about 140 percent of the average diameter.

53. The method of claim 49 wherein the product particles have an average particle size of no more than about 250 nm.

54. The method of claim 49 wherein the product particles have an average particle size of no more than about 95 nm.

55. The method of claim 49 comprising forming a reactant flow, wherein the reacting the at least one precursor compound is performed within a reaction chamber and wherein the reactant flow is directed by a reactant inlet nozzle.

56. The method of claim 49 wherein the reacting at least one precursor compound comprises reacting a plurality of precursor compounds.

57. A collection of particles formed by the method of claim 49.

58. A device comprising the collection of particles of claim 57.

59. A powder coating formed by depositing particles on a substrate surface wherein the particles are formed as product particles using the method of claim 49.

60. A device comprising the powder coating of claim 59.

61. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 500 nm, the primary particles having effectively no particles with a diameter greater than about 4 times the average primary particle size, the method comprising reacting at least one precursor compound to produce the product particles at a rate of at least about 35 grams per hour.

62. The method of claim 61 wherein the primary particles are substantially unfused resulting in an average particle size and particle size distribution approximately equal respectively to the average primary particle size and primary particle size distribution.

63. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 500 nm, wherein the product particles have a distribution of particle sizes in which at least about 95 percent of the particles have a diameter greater than about 60 percent of the average diameter and less than about 140 percent of the average diameter, the method comprising reacting at least one precursor compound to produce the product particles at a rate of at least about 35 grams per hour.

64. The method of claim 63 wherein the primary particles are substantially unfused resulting in an average particle size and particle size distribution approximately equal respectively to the average primary particle size and primary particle size distribution.

65. A collection of particles formed by the method of claim 63.

66. A device comprising the collection of particles of claim 65.

67. A powder coating formed by depositing particles on a substrate surface wherein the particles are formed as product particles using the method of claim 63.

68. A device comprising the powder coating of claim 67.

69. A method for producing product particles comprising an inorganic composition wherein the particles have an average particle size of no more than about 500 nm, wherein the product particles have primary particles with a distribution of particle sizes in which at least about 95 percent of the primary particles have a diameter greater than about 60 percent of the average diameter and less than about 140 percent of the average diameter, the method comprising reacting at least one precursor compound to produce the product particles at a rate of at least about 35 grams per hour.

70. The method of claim 69 wherein the primary particles are substantially unfused resulting in an average particle size and particle size distribution approximately equal respectively to the average primary particle size and primary particle size distribution.

71. A powder coating comprising an inorganic composition, the powder coating comprising primary particles having an average particle size less than about 500 nm and effectively no primary particles having a diameter greater than about 4 times the average primary particle diameter.

72. The powder coating of claim 71 wherein the average primary particle size is less than about 100 nm.

73. The powder coating of claim 71 wherein the average primary particle size is less than about 50 nm.

74. The powder coating of claim 71 wherein effectively no primary particles have a diameter greater than about 3 times the average primary particle diameter.

75. The powder coating of claim 71 wherein effectively no primary particles have a diameter greater than about 2 times the average primary particle diameter.

76. The powder coating of claim 71 wherein the primary particles have a distribution in diameters with at least about 95 percent of the primary particles having a diameter greater than about 40 percent of the average diameter and less than about 225 percent of the average diameter.

77. The powder coating of claim 71 wherein the primary particles have a distribution of diameters with at least about 95 percent of the primary particles having a diameter greater than about 45 percent of the average diameter and less than about 200 percent of the average diameter.

78. The powder coating of claim 71 wherein the metal/metalloid compound comprises silicon oxide.

79. The powder coating of claim 78 wherein the metal/metalloid compound further comprises a metal oxide.

80. The powder coating of claim 79 wherein the metal oxide comprises a rare earth metal.

81. The powder coating of claim 71 wherein the metal/metalloid compound comprises a plurality of metalloid compounds.

82. The powder coating of claim 71 wherein the metal/metalloid compound comprises a plurality of metal compounds.

83. The powder coating of claim 71 wherein powder coating has a thickness of no more than about 500 microns.

84. The powder coating of claim 71 wherein the powder coating has a thickness from about to about 100 nanometers to about 50 microns.

85. The powder coating of claim 71 having approximately a uniform thickness across the powder coating.

86. The powder coating of claim 71 wherein the powder coating is adjacent a substrate surface.

87. The powder coating of claim 86 wherein the substrate comprises silicon.

88. The powder coating of claim 71 having a density less than about 0.6 times the density of the fully densified material of the powder coating.

89. The powder coating of claim 71 having a density from about 0.05 to about 0.4 times the density of the fully densified material of the powder coating.

90. A device comprising the powder coating of claim 71.

91. A method for forming a powder coating the method comprising:

reacting a flowing reactant stream to form a flow of product particles having an average diameter less than about 500 nanometers and having effectively no particles with a diameter greater than about 4 times the average diameter; and

depositing the product particles on a substrate from the flow.

92. The method of claim 91 wherein the flowing reactant stream is elongated in one dimension perpendicular to the direction of the flow.

93. The method of claim 91 wherein reacting the flowing reactant stream comprises irradiating the reactant flow with a radiation beam.

94. The method of claim 93 wherein the radiation beam is generated by a light source.

95. The method of claim 91 wherein the light source comprises a laser.

96. The method of claim 91 wherein the product particles have an average diameter no more than about 100 nanometers.

97. The method of claim 91 wherein the depositing of the product particles generates a powder coating having a density from about 0.05 to about 0.4 times the density of the fully densified material of the powder coating.

98. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 75 nm, the method comprising a step for producing the product particles at a rate of at least about 35 grams per hour.

99. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 500 nm, the particles having effectively no particles with a diameter greater than about 4 times the average particle size, the method comprising a step for producing the product particles at a rate of at least about 35 grams per hour.

100. A method for producing product particles comprising an inorganic composition wherein the product particles have an average particle size of no more than about 500 nm, wherein the product particles have a distribution of particle sizes in which at least about 95 percent of the particles have a diameter greater than about 60 percent of the average diameter and less than about 140 percent of the average diameter, the method comprising a step for producing the product particles at a rate of at least about 35 grams per hour.