ABSOLUTE PRESSURE SENSOR
First Claim
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1. A pressure sensor, comprising:
- a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;
a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway; and
a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.
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25 Claims
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1. A pressure sensor, comprising:
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a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;
a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway; and
a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A gage pressure transmitter that includes a barometric pressure sensor, the barometric pressure sensor comprising:
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a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;
a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway; and
a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification