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ABSOLUTE PRESSURE SENSOR

  • US 20030205089A1
  • Filed: 05/06/2002
  • Published: 11/06/2003
  • Est. Priority Date: 05/06/2002
  • Status: Active Grant
First Claim
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1. A pressure sensor, comprising:

  • a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;

    a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway; and

    a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.

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