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Method of inspecting circuit pattern and inspecting instrument

  • US 20030206027A1
  • Filed: 05/07/2003
  • Published: 11/06/2003
  • Est. Priority Date: 04/28/1999
  • Status: Active Grant
First Claim
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1. A circuit pattern inspection method having a step of scanning a board surface with a pattern formed on a sample with an electron beam, a step of applying a voltage to said sample, a step of detecting a signal secondarily generated from said board surface by said electron beam, a step of forming an electron beam image of said board surface from said detected signal, and a step of storing said electron beam image and including a step of deciding a failure from said stored image, wherein said method includes a step of finding electron beam irradiation conditions for entering onto said board surface according to a pattern to be inspected.

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