Universal wafer carrier for wafer level die burn-in
First Claim
1. A reusable apparatus for performing at least one operation for a wafer having at least portions of a plurality of semiconductor dice thereon comprising:
- a first rigid support member for receiving said wafer form having a predetermined orientation, the first rigid support member having a plurality of contact members thereon and having a plurality of electrical connectors connected to the contact members for establishing communication with circuitry used in said operation;
a second rigid support member for selectively engaging the first rigid support member to retain said wafer therebetween, one of the first rigid support member and the second rigid support member including a cavity for retaining said wafer therein during said operation; and
a biasing assembly including a single floating platform having an area substantially sized for the single cavity, the biasing assembly mounted to one of the first rigid support member and second rigid support member, the biasing assembly having a shape for uniformly biasing portions of said wafer against the contact members.
0 Assignments
0 Petitions
Accused Products
Abstract
A reusable burn-in/test fixture for testing unsingulated dice on a semiconductor wafer consists of two halves. The first half of the test fixture is a wafer cavity plate for receiving the wafer, and the second half establishes electrical communication between the wafer and electrical test equipment. A rigid substrate has conductors thereon which establish electrical contact with the wafer. The test fixture need not be opened until the burn-in and electrical test are completed. After burn-in stress and electrical test, it is possible to establish interconnection between the single die or separate and package dice into discrete parts, arrays or clusters, either as singulated parts or as arrays.
-
Citations
8 Claims
-
1. A reusable apparatus for performing at least one operation for a wafer having at least portions of a plurality of semiconductor dice thereon comprising:
-
a first rigid support member for receiving said wafer form having a predetermined orientation, the first rigid support member having a plurality of contact members thereon and having a plurality of electrical connectors connected to the contact members for establishing communication with circuitry used in said operation;
a second rigid support member for selectively engaging the first rigid support member to retain said wafer therebetween, one of the first rigid support member and the second rigid support member including a cavity for retaining said wafer therein during said operation; and
a biasing assembly including a single floating platform having an area substantially sized for the single cavity, the biasing assembly mounted to one of the first rigid support member and second rigid support member, the biasing assembly having a shape for uniformly biasing portions of said wafer against the contact members. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A reusable wafer apparatus for use in an operation comprising:
-
a first rigid support member and a second rigid support member for receiving a plurality of semiconductor dice on a wafer therebetween, one of the first rigid support member and second rigid support member including a single cavity having substantially the same shape as the wafer for retaining said plurality of semiconductor dice on a wafer therein during said operation;
a plurality of contact members formed on the first rigid support member for communicating with electrical connectors for connecting to external circuitry for said operation;
a single biasing assembly including a single floating platform having a preselected area substantially sized to correspond with the single cavity and an elastomeric member disposed on the second rigid support member, the single biasing assembly sized for uniformly biasing said wafer towards the contact members, the single floating platform directly supporting the wafer having the elastomeric member sandwiched between the single floating platform and the second rigid support member. - View Dependent Claims (7, 8)
-
Specification