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Method for examining foreign matters in through holes

  • US 20030206651A1
  • Filed: 03/29/2001
  • Published: 11/06/2003
  • Est. Priority Date: 04/27/2000
  • Status: Active Grant
First Claim
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1. A method for examining foreign matters in through holes characterized in that light passing through a plurality of through holes having a uniform size is simultaneously taken as image data, a number of light receiving regions corresponding to the imaged respective through holes, each being treated as a mass, is initially counted, and a process to determine presence or absence of foreign matters is conducted by mutually comparing areas of adjacent ones of the light receiving regions for only a work piece with a counted value of light receiving regions being concurred with a specified value.

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