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Data brokering system for integrated remote tool access, data collection, and control

  • US 20030208448A1
  • Filed: 03/12/2003
  • Published: 11/06/2003
  • Est. Priority Date: 03/12/2002
  • Status: Abandoned Application
First Claim
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1. A data brokering system for semiconductor wafer data, comprising:

  • a FAB having at least one automated semiconductor wafer manufacturing tool;

    a plurality of OEMS, coupled to said FAB via a secure service net;

    means for providing data about a semiconductor wafer manufactured by said tool to one of said OEMs without revealing information about said tool; and

    means for collecting fees based on characteristics of said provided data.

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