Data brokering system for integrated remote tool access, data collection, and control
First Claim
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1. A data brokering system for semiconductor wafer data, comprising:
- a FAB having at least one automated semiconductor wafer manufacturing tool;
a plurality of OEMS, coupled to said FAB via a secure service net;
means for providing data about a semiconductor wafer manufactured by said tool to one of said OEMs without revealing information about said tool; and
means for collecting fees based on characteristics of said provided data.
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Abstract
A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the tool to one of the OEMs without revealing information about the tool; and means for collecting fees based on characteristics of the provided data.
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Citations
5 Claims
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1. A data brokering system for semiconductor wafer data, comprising:
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a FAB having at least one automated semiconductor wafer manufacturing tool;
a plurality of OEMS, coupled to said FAB via a secure service net;
means for providing data about a semiconductor wafer manufactured by said tool to one of said OEMs without revealing information about said tool; and
means for collecting fees based on characteristics of said provided data. - View Dependent Claims (2, 3, 4, 5)
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Specification