Method of forming nanofluidic channels
First Claim
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1. A method of forming enclosed nanofluidic channels, said method comprising:
- providing a first substrate having a layer of a first material thereon;
providing a second substrate;
forming a slot along said second substrate, said slot being formed by nanolithography and etching; and
bonding said first substrate to said second substrate such that said layer of said first material on said first substrate is adjacent said slot on said second substrate to define an enclosed nanofluidic channel therethrough.
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Abstract
A method of forming nanofluidic enclosed channels includes providing a first substrate having a layer of a first material disposed thereon. A plurality of nanoscale slots is formed along a second substrate using nanolithography, etching, or other disclosed techniques. The first substrate is then bonded to the second substrate such that the layer of the first material on the first substrate is adjacent the plurality of slots on the second substrate to define a plurality of enclosed nanofluidic channels therethrough.
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16 Claims
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1. A method of forming enclosed nanofluidic channels, said method comprising:
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providing a first substrate having a layer of a first material thereon;
providing a second substrate;
forming a slot along said second substrate, said slot being formed by nanolithography and etching; and
bonding said first substrate to said second substrate such that said layer of said first material on said first substrate is adjacent said slot on said second substrate to define an enclosed nanofluidic channel therethrough. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of forming enclosed nanofluidic channels, said method comprising:
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providing a first substrate having a layer of a first material thereon;
providing a second substrate;
forming a slot having a plurality of fiberous nanostructures extending therein along said second substrate, said slot and said plurality of fiberous nanostructures being formed by etching; and
bonding said first substrate to said second substrate such that said layer of said first material on said first substrate is adjacent said slot on said second substrate to define an enclosed nanofluidic channel therethrough. - View Dependent Claims (8, 9, 10, 11)
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12. A method of forming enclosed nanofluidic channels, said method comprising:
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providing a first substrate having a layer of a first material thereon;
providing a second substrate having a layer of a second material thereon;
forming a slot into said layer of said second material, said slot being formed by stamping; and
bonding said first substrate to said second substrate such that said layer of said first material on said first substrate is adjacent said slot on said second substrate to define an enclosed nanofluidic channel therethrough. - View Dependent Claims (13, 14, 15, 16)
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Specification