Coplanar mounting member for a mem sensor
First Claim
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1. A coplanar mounting member for a MEM sensor, comprising:
- a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit;
a second surface inclined to said surface of said board for mounting a MEM sensor; and
an electrical conductor array for interconnecting the MEM sensor with the connection pad on the board.
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Abstract
A coplanar mounting member for a MEM sensor includes a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit; a second surface inclined to the surface of the board for mounting a MEM sensor and an electrical conductor array for interconnecting the MEM sensor with the connection pad on the board.
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Citations
15 Claims
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1. A coplanar mounting member for a MEM sensor, comprising:
- a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit;
a second surface inclined to said surface of said board for mounting a MEM sensor; and
an electrical conductor array for interconnecting the MEM sensor with the connection pad on the board. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit;
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10. A three axes MEM accelerometer system comprising:
- three MEM accelerometer sensors;
a MEM sensor board including a MEM sensor control circuit for said accelerometer sensors;
said accelerometer sensors being mounted mutually orthogonally;
at least two coplanar mounting members having a first surface coplanar with a connection pad on the surface of said sensor board, a second surface inclined to said surface of said board for mounting a MEM accelerometer sensor, and an electrical conductor array for interconnecting the MEM accelerometer sensor with the connection pad on the board. - View Dependent Claims (11, 12)
- three MEM accelerometer sensors;
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13. A three axes MEMs gyroscope system comprising:
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three MEM gyroscopes;
a MEM sensor board including a MEM sensor electronic current for said gyroscope sensors;
said gyroscope sensors being mounted mutually orthogonally;
at least one coplanar mounting member having a first surface coplanar with a connection pad on the surface of said sensor board, a second surface inclined to said surface of said board for mounting a MEM gyroscope sensor, and an electrical conductor array for interconnecting a MEM gyroscope sensor with the connection pad on the board. - View Dependent Claims (14, 15)
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Specification