Surface micromachined optical system with reinforced mirror microstructure
First Claim
1. A surface micromachined optical system that comprises:
- a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate;
a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a plurality of first columns that are disposed in spaced relation relative to each other, and further that extend between and fixedly interconnect said first and second structural layers, wherein each said first column is fixed to each of said first and second structural layers such that said first structural layer, said second structural layer, and said plurality of first columns collectively move together in response to said first actuator.
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Accused Products
Abstract
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.
5 Citations
20 Claims
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1. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate;
a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a plurality of first columns that are disposed in spaced relation relative to each other, and further that extend between and fixedly interconnect said first and second structural layers, wherein each said first column is fixed to each of said first and second structural layers such that said first structural layer, said second structural layer, and said plurality of first columns collectively move together in response to said first actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification