Optical device and a movable mirror driving method

• US 20030210453A1
• Filed: 04/22/2003
• Published: 11/13/2003
• Est. Priority Date: 05/09/2002
• Status: Abandoned Application

• Current Assignee: NEC Corporation
• Original Assignee: NEC Corporation
• Inventors: Noda, Shunji
• Application Number:
  US10/419,947
• Publication Number:
  US 20030210453A1
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence

Abstract

An optical device characterized by comprising; a movable mirror between a first substrate and a second substrate, a first pair of a movable mil-or driving devices on the first substrate and a second pair of a movable mirror driving devices on the second substrate. The first pair of the movable mirror driving device are made of an optical signal-transmissible material. The first pair of a movable mirror driving devices and the second pair of a movable mirror driving devices arranged on the surface side and the rear surface side of the movable mirror. The mirror is inclined by the electrostatic attractive force between the movable driving devices and the mirror to control the reflection direction of the optical signal.

Claims

1. An optical device by comprising:

a movable mirror between a movable mirror driving device and a substrate,

wherein said movable mirror driving device is made of an optical signal-transmissible material.

12. A optical switch comprising at least one optical device according to claim 1.

13. A scanning system comprising at least one optical device according to claim 1.

14. A printer comprising at least one optical device according to claim 1.

15. A display comprising at least one optical device according to claim 1.

2. An optical device comprising:

a movable mirror between a first substrate and a second substrate; and

a first pair of movable mirror driving devices on said first substrate,

wherein said first pair of movable mirror driving devices is made of an optical signal-transmissible material.

3. An optical device according to claim 2, further comprising a second pair of movable mirror driving devices on said second substrate.

4. An optical device according to claim 3, wherein at least one of said first pair of a movable mirror driving device is arranged on an optical signal incident path to said movable mirror.

5. An optical device according to claim 4, wherein said first substrate is made of an optical-transmissible material.

6. An optical device according to claim 5, wherein said first pair of movable mirror driving devices is made of polysilicon.

7. An optical device according to claim 6, wherein said first substrate is a glass substrate.

8. An optical device according to claim 7, further comprising a capacitor between at least one of said first pair of a movable mirror driving devices and said movable mirror or at least one of said second pair of movable mirror driving devices and said movable mirror,

wherein said first pair of movable mirror driving devices and said second pair of movable mirror driving devices are electrodes.

9. An optical device according to claim 7, further comprising a capacitor between at least one of said first pair of movable mirror driving devices and said movable mirror and at least one of said second pair of movable mirror driving devices and said movable mirror,

wherein said first pair of movable mirror driving devices and said second pair of movable mirror driving devices are electrodes.

10. An optical device according to claim 7, wherein said first pair of movable mirror driving devices and said second pair of movable mirror driving devices are coils, and

a magnetic material is deposited onto at least one part of said mirror.

11. An optical device according to claim 2, wherein a driving circuit is formed on at least said first substrate or said second substrate.

16. An optical device according to claim 5, wherein said movable mirror is packed in an enclosure, and

wherein said enclosure is formed of said first and second substrates and a portion for supporting said first and second substrates.

17. An optical device according to claim 16, wherein said enclosure is filled with gas or liquid other than air.

18. An optical device according to claim 16, wherein at least one part of said enclosure is made of an electromagnetic shielding material.

19. An optical device according to claim 16, wherein a driving circuit is formed on said enclosure.

20. A optical switch comprising at least one optical device according to claim 16.

21. A scanning system comprising at least one optical device according to claim 16.

22. A printer comprising at least one optical device according to claim 16.

23. A display comprising at least one optical device according to claim 16.

24. A method of driving a movable mirror comprising:

applying a voltage to an electrode; and

generating an electrostatic force between said electrode and said movable mirror to drive said movable mirror in response to said electrostatic force and causing an optical signal to be transmitted through said electrode.

25. A method of driving a movable mirror comprising:

applying a voltage to a coil; and

generating an electromagnetic force between said coil and said movable mirror to drive said movable mirror in response to said electromagnetic force and causing an optical signal to be transmitted through said coil.