Laser-written cladding for waveguide formations in glass

• US 20030215204A1
• Filed: 05/16/2002
• Published: 11/20/2003
• Est. Priority Date: 05/16/2002
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Streltsov, Alexander, Schroeder, Joseph F.
• Granted Patent: US 6,950,591 B2
• Time in Patent Office: Days
• US Class Current: 385/132
• CPC Class Codes: C03C 23/0025 by a laser beam
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: Y10S 430/146 Laser beam

Abstract

High-energy pulses of femtosecond lasers form cladding portions of waveguides in bulk glass by producing localized reductions in refractive index. The cladding portions written by the high-energy pulses circumscribe unexposed core portions for defining light-guiding pathways in the bulk glass.

Claims

1. A method of writing embedded waveguides in an optical medium using femtosecond pulses comprising the steps of:

producing a beam of light composed of a train of pulses having a width less than 200 femtoseconds and having a wavelength beyond an absorption edge of the optical medium;

focusing the beam within an interior of the optical medium at a power density sufficient to produce a local reduction in a refractive index of optical medium where the beam is focused; and

relatively moving the optical medium with respect to the focused beam tracing a cladding pattern in the optical medium having a refractive index reduced with respect to a core circumscribed by the cladding pattern for producing a waveguide embedded in the optical medium.

2. The method of claim 1 in which the step of relatively moving includes relatively moving the optical medium with respect to the focused beam in a helical pattern.

3. The method of claim 2 in which the step of relatively moving includes a component of motion along an axis of the helical pattern aligned with a length of the embedded waveguide.

4. The method of claim 3 in which the step of relatively moving includes relatively inclining the axis of the helical pattern to produce bends in the embedded waveguide.

5. The method of claim 1 in which the step of relatively moving includes relatively moving the optical medium with respect to the focused beam in a pattern that defines a transverse shape of the circumscribed core.

6. The method of claim 5 in which the transverse shape of the circumscribed core departs from a circle.

7. The method of claim 5 in which the step of relatively moving includes relatively moving the optical medium with respect to the focused beam in a pattern that varies a transverse dimension of the circumscribed core as a function of a relative movement along a length of the core.

8. The method of claim 1 in which the step of focusing the beam includes producing a local reduction in a refractive index of the optical medium by at least 1×

10<sup>−

2</sup>.

9. The method of claim 1 in which the step of focusing the beam includes producing a local reduction in a refractive index of the optical medium by a process of chemical deformation and rearrangement.

10. The method of claim 9 in which the step of focusing the beam includes producing a local reduction in a refractive index of the optical medium by creating voids in the medium.

11. The method of claim 9 including a further step of annealing the optical medium.

12. The method of claim 1 in which the step of focusing the beam includes focusing the beam to a spot size for producing a local reduction in the refractive index of optical medium over an area that is wider than wavelengths of light intended to be guided along the embedded waveguide.

13. The method of claim 12 in which the step of focusing the beam includes focusing the beam to a spot size having an average diameter of 3 microns to 5 microns.

14. The method of claim 1 in which the step of producing the beam includes producing the beam with pulse energies ranging from 0.1 microjoules (μ

J) to 20 microjoules (μ

J).

15. A method of writing a waveguide in an optical medium using a laser beam comprising the steps of:

orienting the laser beam having a wavelength beyond an absorption edge of the optical medium with respect to the optical medium having an underlying refractive index;

powering the laser beam at a magnitude that produces a localized reduction in the underlying refractive index of the optical medium;

imparting a relative motion between the laser beam and the optical medium along a path of exposure that extends the localized reduction in the underlying index through the optical medium; and

shaping the path of exposure to at least partially circumscribe a path that is not similarly exposed by the laser beam so that the path of exposure forms a cladding portion of the waveguide and the at least partially circumscribed path forms a core portion of the waveguide.

16. The method of claim 15 in which the laser beam is composed of a train of pulses having a width less than 200 femtoseconds.

17. The method of claim 16 in which the laser beam is composed of a train of pulses having a width less than 50 femtoseconds.

18. The method of claim 16 in which the step of powering includes using pulses having pulse energies greater than 100 nanojoules (nJ).

19. The method of claim 18 in which the optical medium is a single-crystal material.

20. The method of claim 16 in which the step of powering includes using pulses having pulse energies greater than 1 microjoule (μ

J).

21. The method of claim 20 in which the optical medium is an amorphous glass.

22. The method of claim 15 including a further step of focusing the laser beam within an interior of the optical medium so that both the core portion and the surrounding cladding portion of the waveguide extend a common length within the interior of the optical medium at a distance from an exterior surface of the optical medium.

23. The method of claim 22 in which the further step of focusing the laser beam includes focusing the laser beam to a substantially diffraction limited spot size.

24. The method of claim 23 in which the further step of focusing the laser beam includes focusing the laser beam through a numerical aperture of at least 0.2.

25. The method of claim 22 in which the step of imparting relative motion includes relatively moving the optical medium with respect to the focused beam in a helical pattern.

26. The method of claim 22 in which the step of imparting relative motion includes forming the core portion in a transverse shape that departs from a circle.

27. The method of claim 22 in which the step of imparting relative motion includes relatively moving the optical medium with respect to the focused beam in a pattern that varies a transverse dimension of the core portion as a function of a relative movement along a length of the core portion.

28. The method of claim 15 in which the core portion has a refractive index substantially equal to the underlying refractive index of the optical medium.

29. The method of claim 28 in which a portion of the optical medium surrounding and adjacent to the cladding portion also has a refractive index substantially equal to the underlying refractive index of the optical medium.

30. The method of claim 28 in which the cladding portion has a refractive index reduced with respect to the underlying refractive index of the optical medium by at least 1×

10<sup>−

2</sup>.

31. The method of claim 15 including a further step of annealing the optical medium.

32. An optical waveguide embedded within an interior of an optical medium comprising:

the optical medium exhibiting an underlying refractive index;

a core portion of the embedded waveguide having a refractive index substantially equal to the underlying refractive index of the optical medium;

a cladding portion of the embedded waveguide surrounding the core portion and having a refractive index substantially reduced with respect to the underlying refractive index of the optical medium, and

both the core portion and the surrounding cladding portion of the embedded waveguide extending a common length within the interior of the optical medium at a distance from an exterior surface of the optical medium.

33. The waveguide of claim 32 in which the optical medium exhibits a uniform refractive index.

34. The waveguide of claim 33 in which the optical medium is made of a homogeneous material.

35. The waveguide of claim 33 in which the core portion has a refractive index substantially equal to the uniform refractive index of the optical medium.

36. The waveguide of claim 35 in which the cladding portion has a refractive index substantially reduced with respect to the uniform refractive index of the optical medium.

37. The waveguide of claim 36 in which the cladding portion is surrounded by a portion of the optical medium having a refractive index substantially equal to the uniform refractive index of the optical medium.

38. The waveguide of claim 32 in which the cladding portion of the embedded waveguide has a reduced density with respect to an underlying density of the optical medium.

39. The waveguide of claim 38 in which the cladding portion includes voids that reduce the refractive index of the cladding portion with respect to the underlying refractive index of the optical medium.

40. The waveguide of claim 38 in which the refractive index of the cladding portion is reduced with respect to the underlying index of the optical medium by at least 1×

10<sup>−

2</sup>.

41. The waveguide of claim 32 in which the cladding portion is formed as a helical trace surrounding the core portion in the optical medium.

42. The waveguide of claim 32 in which a transverse shape of the core portion circumscribed by the cladding portion departs from a circle.

43. The waveguide of claim 32 in which a transverse size of the core portion circumscribed by the cladding portion is varied as a function of a length of the embedded waveguide.