Inertia force sensor
First Claim
1. An inertia sensor comprising:
- insulating substrates; and
a silicon structure that is bonded between the insulating substrates with clearance space secured therebetween, said silicon structure having a movable portion and a fixed portion, with the movable portion having a movable electrode portion that is capable of making displacement in the direction of inertia force, a pair of beam structures for the movable portion that are connected to both ends of the movable electrode portion and support the movable electrode portion in the air over the clearance space and a pair of support portions for the movable portion that support the beam portion for the movable portion and are bonded to the insulating substrate, and the fixed portion has a fixed electrode portion disposed to oppose the movable electrode portion and a support portion for the fixed part that supports the fixed electrode portion and is bonded to the insulating substrate, wherein stopper portions that restrict the displacement of the movable electrode portion are provided on the outer four corners of the pair of the beam structures for the movable portion such that the movable electrode portion is brought into contact with the support portion for the movable part and the support portion for the fixed part, and wherein a damper portion, that consists of a cantilever for the movable part that is provided on the movable electrode portion so as to protrude therefrom and extend over the clearance space and a cantilever for the fixed part that is provided on the support portion for the movable part or the support portion for the fixed part so as to protrude therefrom and extend over the clearance space, is disposed near each of the stopper portions so that the cantilever for the movable part and the cantilever for the fixed part make contact with each other, before the movable electrode portion contacts the support portion for the movable part and the support portion for the fixed part.
1 Assignment
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Accused Products
Abstract
An inertia force sensor of the invention is provided with a damper portion. The damper portion includes a cantilever for a movable part disposed in a movable electrode portion so as to protrude therefrom and a cantilever for a fixed part disposed in a support portion for the movable part or a support portion for the fixed part so as to protrude therefrom. The damper portion is formed so that the cantilever for the movable part and the cantilever for the fixed part contact each other before the movable electrode portion contacts the support portion for the movable part and the support portion for the fixed part. As a result, it is possible to prevent a stopper portion from being damaged and improve the reliability of the sensor.
13 Citations
5 Claims
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1. An inertia sensor comprising:
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insulating substrates; and
a silicon structure that is bonded between the insulating substrates with clearance space secured therebetween, said silicon structure having a movable portion and a fixed portion, with the movable portion having a movable electrode portion that is capable of making displacement in the direction of inertia force, a pair of beam structures for the movable portion that are connected to both ends of the movable electrode portion and support the movable electrode portion in the air over the clearance space and a pair of support portions for the movable portion that support the beam portion for the movable portion and are bonded to the insulating substrate, and the fixed portion has a fixed electrode portion disposed to oppose the movable electrode portion and a support portion for the fixed part that supports the fixed electrode portion and is bonded to the insulating substrate, wherein stopper portions that restrict the displacement of the movable electrode portion are provided on the outer four corners of the pair of the beam structures for the movable portion such that the movable electrode portion is brought into contact with the support portion for the movable part and the support portion for the fixed part, and wherein a damper portion, that consists of a cantilever for the movable part that is provided on the movable electrode portion so as to protrude therefrom and extend over the clearance space and a cantilever for the fixed part that is provided on the support portion for the movable part or the support portion for the fixed part so as to protrude therefrom and extend over the clearance space, is disposed near each of the stopper portions so that the cantilever for the movable part and the cantilever for the fixed part make contact with each other, before the movable electrode portion contacts the support portion for the movable part and the support portion for the fixed part. - View Dependent Claims (2, 3, 4, 5)
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Specification