Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus
First Claim
1. A supporting apparatus comprising:
- a first movable member; and
a supporting unit having a plurality of magnets whose same poles are arranged to face each other, said supporting unit being configured to support said movable member using a floating force generated by said plurality of magnets as a repulsive force in a floating direction perpendicular to a facing direction of said plurality of magnets.
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Accused Products
Abstract
Compatibility of a small spring constant and large supporting load is realized, so that a stable operation is assured even if a fine-movement linear motor fails. A supporting unit, having a plurality of magnets whose same poles are arranged facing each other, is adapted to support the self-weight of a top plate on which an object to be positioned is mounted, using a repulsive force in a direction orthogonal to the facing direction of the plurality of magnets. In a characteristic curve representing the relationship between the floating force and displacement in a floating direction, the tangent inclination when the object is at a first position in the floating direction is negative, and the relationship of floating force<the self-weight holds when the object is at a second position lower than the first position.
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Citations
26 Claims
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1. A supporting apparatus comprising:
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a first movable member; and
a supporting unit having a plurality of magnets whose same poles are arranged to face each other, said supporting unit being configured to support said movable member using a floating force generated by said plurality of magnets as a repulsive force in a floating direction perpendicular to a facing direction of said plurality of magnets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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11. A supporting method comprising the steps of:
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providing a first movable member;
providing a plurality of magnets whose same poles are arranged to face each other; and
supporting the first movable member using a floating force generated by the plurality of magnets as a repulsive force in a floating direction perpendicular to a facing direction of the plurality of magnets.
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22. An apparatus comprising:
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a plate arranged to support a wafer, upon which wafer a semiconductor manufacturing process is to be performed;
a supporting device configured to support said plate, said supporting device comprising a movable magnet and a stator comprising a first stator magnet and a second stator magnet disposed on opposite sides of said movable magnet, each of said first stator magnet and said second stator magnet having a pole facing said movable magnet that is inverse to the respective facing pole of said movable magnet. - View Dependent Claims (23, 24, 25, 26)
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Specification